# US 2014/0153605 A1 · Optical device

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- Number: US 2014/0153605 A1
- Document ID: US20140153605A1
- Status: Published application
- Kind: A1
- Application number: 14/091,365
- Filed: 2013-11-27
- Published: 2014-06-05
- Earliest claimed: 2012-11-30
- Assignees: Oclaro Japan, Inc.
- Applicants: Oclaro Japan, Inc.
- Inventors: Hideo ARIMOTO; Koichiro ADACHI; Misuzu SAGAWA; Takanori SUZUKI; Hiroyasu SASAKI
- Web page: https://patentgrep.com/patent/US20140153605A1

## CPC

- H01S 5/0267: {Integrated focusing lens (H01S5/18388 takes precedence)}
- G02B 6/3518: {the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device (MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833)}
- G02B 6/4206: {Optical features (G02B6/4207, G02B6/421 take precedence)}
- G02B 6/4214: {the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device (G02B6/4246 takes precedence)}
- G02B 6/4219: {Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor}
- G02B 6/124: Geodesic lenses or integrated gratings
- G02B 6/4249: {comprising arrays of active devices and fibres}
- H01S 5/12: the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers (comprising a photonic bandgap structure H01S5/11; surface-emitting lasers H01S5/18)
- H01S 5/185: having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL] (comprising a photonic bandgap structure H01S5/11)
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An optical device includes a first substrate, having first and second surfaces, and a second substrate having a third surface. The first substrate includes: a laser unit, having an active layer and emitting light into the first substrate from the active layer; a reflecting mirror, having a plane obliquely intersecting an optical axis of light emitted from the laser unit, and being formed on the first surface so as to reflect the light toward the second surface; and a convex lens, being formed in a region on the second surface, the region including an optical axis of the light reflected by the reflecting mirror. The second substrate is provided with a grating coupler and an optical waveguide on the third surface, the optical waveguide having light incident on the grating coupler propagating therethrough.

## Claims

### Claim 1

An optical device comprising:
a first substrate, formed of a semiconductor material and having a first surface and a second surface which is a rear surface of the first surface, the first substrate comprising:
a laser unit, having an active layer laminated between the first surface and the second surface and emitting light into the first substrate from the active layer;
a reflecting mirror, having a plane obliquely intersecting an optical axis of light emitted from the laser unit and propagating, and being formed on the first surface so as to reflect the light emitted from the laser unit and propagating, toward the second surface; and
a convex lens, being formed in a region on the second surface, the region including an optical axis of the light reflected by the reflecting mirror; and
a second substrate, having a third surface facing the second surface, and being provided with a grating coupler and an optical waveguide on the third surface thereof, the optical waveguide having light incident on the grating coupler propagating therethrough.

### Claim 2 (depends on 1)

An optical device according to claim 1, wherein the convex lens converges or parallelizes the light reflected by the reflecting mirror so as to cause the light to reach the grating coupler.

### Claim 3 (depends on 2)

An optical device according to claim 2, wherein the optical axis of the light reflected by the reflecting mirror is shifted to an opposite side to the optical waveguide side of the second substrate from an axis penetrating a center of the convex lens, and penetrates a surface of the convex lens.

### Claim 4 (depends on 2)

An optical device according to claim 2, wherein an angle between the optical axis of the light and a normal line of the reflecting mirror is greater than 45 degrees, wherein the light is emitted from the laser unit, propagates, and reaches the reflecting mirror.

### Claim 5 (depends on 1)

An optical device according to claim 1, further comprising an isolator which is disposed between the first substrate and the second substrate and on a light path of light, to reach the grating coupler after having passed through the convex lens.

### Claim 6 (depends on 1)

An optical device according to claim 1, further comprising:
a first angle variable reflecting mirror, located between the first substrate and the second substrate, which reflects light having passed through the convex lens; and
a second angle variable reflecting mirror which reflects the light reflected by the first angle variable reflecting mirror so as to cause the light to reach the grating coupler.

### Claim 7 (depends on 6)

An optical device according to claim 6, further comprising an isolator, being disposed on a light path of the light, to reach the second angle variable reflecting mirror after being reflected by the first angle variable reflecting mirror.

### Claim 8 (depends on 3)

An optical device according to claim 3, wherein a shift of the optical axis of the light reflected by the reflecting mirror with respect to the axis penetrating the center of the convex lens is equal to or less than 18 μm.

### Claim 9 (depends on 4)

An optical device according to claim 4, wherein the formed angle is equal to or less than 48 degrees.

### Claim 10 (depends on 1)

An optical device according to claim 1,
wherein the first substrate comprises a plurality of integrated laser element units each having the laser unit, the reflecting mirror, and the convex lens,
wherein a plurality of integrated waveguide circuit units each including the grating coupler and the optical waveguide are formed on the second substrate, and
wherein light having passed through the convex lens of each of the integrated laser element units is incident on the grating coupler of the corresponding integrated waveguide circuit unit.

### Claim 11 (depends on 10)

An optical device according to claim 10, further comprising an isolator, being disposed between the first substrate and the second substrate and over light paths of light beams, to reach the grating couplers of the corresponding integrated waveguide circuit units after having passed through the convex lenses of the plurality of integrated laser element units.

### Claim 12 (depends on 1)

An optical device according to claim 1,
wherein the first substrate comprises a plurality of integrated laser element units each having the laser unit and a laser optical waveguide for propagating the light emitted from the laser unit to the reflecting mirror,
wherein wavelengths of the light beams emitted from the laser units of the plurality of integrated laser element units are different from each other, and
wherein optical axes of light beams, propagating through the laser optical waveguides of the plurality of integrated laser element units and reflected by the reflecting mirror, are shifted to an opposite side to the optical waveguide side of the second substrate from an axis penetrating a center of the convex lens, and penetrate a surface of the convex lens.

### Claim 13 (depends on 1)

An optical device according to claim 1, wherein the second substrate is formed of any one material of Si, GaAs, InP, and glass.
