# US 2014/0153136 A1 · Novel fill-in contact layer for slider air bearing surface protective coating > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0153136 A1 - Document ID: US20140153136A1 - Status: Published application - Kind: A1 - Application number: 13/691,551 - Filed: 2012-11-30 - Published: 2014-06-05 - Earliest claimed: 2012-11-30 - Assignees: HGST Netherlands B.V. - Applicants: Hgst Netherlands B.V. - Inventors: Eric W. Flint; Cherngye Hwang; Randall G. Simmons - Web page: https://patentgrep.com/patent/US20140153136A1 ## CPC - G11B 5/10: Structure or manufacture of housings or shields for heads - G11B 5/40: Protective measures on heads, e.g. against excessive temperature (G11B5/31 takes precedence; protection against wear G11B5/255 {; protective structure of the head: see under structures, e.g. G11B5/3106}) - G11B 5/6082: {Design of the air bearing surface} - G11B 5/255: comprising means for protection against wear {(in thin film structures G11B5/3106)} - G11B 5/3106: {where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination (G11B5/3133 takes precedence)} - G11B 5/3163: {Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers} - G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R) ## Abstract A magnetic slider for magnetic data recording constructed by a process that allows for careful control of seed layer and overcoat thickness. The slider is treated by a process that result in surface pits and scratches. A refill layer is used to fill in the pits and scratches, the refill layer being constructed of a material that does not include Si or carbon. An angled ion beam etching can be used to remove portions of the refill layer that extend outside of the pits and scratches. Then, a seed layer comprising Si and a protective layer comprising C are deposited over the surface. Because the refill layer does not contain either of Si or C, the thickness of the seed layer and carbon overcoat can be accurately measured and controlled, without the refill layer being mistaken for seed or overcoat material. ## Claims ### Claim 1 A slider for magnetic data recording, comprising: a slider body having a surface with a roughness that includes troughs and peaks; a refill material filling at least some of the troughs, the refill material being a material that does not include silicon or carbon; a seed layer comprising Si formed over the slider body surface and refill material; and a protective overcoat comprising carbon formed over the seed layer. ### Claim 2 (depends on 1) The slider as in claim 1 wherein the refill layer comprises AlOx, TaOx, CrOx, TaN or CrN. ### Claim 3 (depends on 1) The slider as in claim 1 wherein the refill layer comprises a material having a high affinity for oxygen. ### Claim 4 (depends on 1) The slider as in claim 1 wherein the seed layer comprises Si or SiN. ### Claim 5 (depends on 1) The slider as in claim 1 wherein the seed layer comprises Si or SiN and has a thickness of 1-10 Angstroms. ### Claim 6 (depends on 1) The slider as in claim 1 wherein the protective overcoat comprises diamond like carbon. ### Claim 7 (depends on 1) The slider as in claim 1 wherein the protective overcoat has a thickness of 5-20 Angstroms. ### Claim 8 (depends on 1) The slider as in claim 1 further comprising, a read element and a write element formed on the slider body. ### Claim 9 (depends on 8) The slider as in claim 8 wherein the read element is recessed from the surface of the slider body. ### Claim 10 A magnetic data recording system, comprising: a housing; a magnetic media mounted within the housing; an actuator; and a slider connected with the actuator for movement adjacent to a surface of the magnetic media, the slider further comprising: a slider body having a surface with a roughness that includes troughs and peaks; a refill material filling at least some of the troughs, the refill material being a material that does not include silicon or carbon; a seed layer comprising Si formed over the slider body surface and refill material; and a protective overcoat comprising carbon formed over the seed layer. ### Claim 11 (depends on 10) The slider as in claim 10 wherein the refill layer comprises AlOx, TaOx, CrOx, TaN or CrN. ### Claim 12 (depends on 10) The slider as in claim 10 wherein the refill layer comprises a material having a high affinity for oxygen. ### Claim 13 (depends on 10) The slider as in claim 10 wherein the seed layer comprises Si or SiN. ### Claim 14 (depends on 10) The slider as in claim 10 wherein the seed layer comprises Si or SiN and has a thickness of 1-10 Angstroms. ### Claim 15 (depends on 10) The slider as in claim 10 wherein the protective overcoat comprises diamond like carbon. ### Claim 16 (depends on 10) The slider as in claim 10 wherein the protective overcoat has a thickness of 1-10 Angstroms. ### Claim 17 (depends on 10) The slider as in claim 10 further comprising, a read element and a write element formed on the slider body. ### Claim 18 (depends on 17) The slider as in claim 17 wherein the read element is recessed from the surface of the slider body. ### Claim 19 A method for manufacturing a magnetic slider for magnetic data recording, the method comprising: forming a slider body having a surface; depositing a refill material onto the surface of the slider body, the refill material being a material that does not contain Si or C; performing an ion beam etching; depositing a seed layer, the seed layer comprising Si; and depositing a protective overcoat; wherein the ion beam etching is a two step ion beam etching, comprising a first ion beam etching performed at an angle of 70-80 degrees relative to normal, and a second ion beam etching performed at an angle of 55-65 degrees relative to normal. ### Claim 20 (canceled) ### Claim 21 A method for manufacturing a magnetic slider for magnetic data recording, the method comprising: forming a slider body having a surface; depositing a refill material onto the surface of the slider body, the refill material being a material that does not contain Si or C; performing an ion beam etching; depositing a seed layer, the seed layer comprising Si; and depositing a protective overcoat; and using XRF or Auger measurements during deposition of the seed layer and protective overcoat layer in order to control a thickness of the seed layer and protective overcoat layer. ### Claim 22 (depends on 21) The method as in claim 21 wherein the seed layer is deposited to a thickness of 1-10 Angstroms and the protective overcoat is deposited to a thickness of 5-20 Angstroms. ### Claim 23 (depends on 19) The method as in claim 19 wherein the refill layer comprises AlOx, TaOx, CrOx, TaN or CrN.