# US 2014/0153099 A1 · Optical member and method of producing the same

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- Number: US 2014/0153099 A1
- Document ID: US20140153099A1
- Status: Published application
- Kind: A1
- Application number: 14/233,723
- Filed: 2012-07-11
- Published: 2014-06-05
- Earliest claimed: 2011-07-21
- Assignees: Canon Kabushiki Kaisha
- Inventors: Masanobu Ogane
- Web page: https://patentgrep.com/patent/US20140153099A1

## CPC

- G02B 1/11: Anti-reflection coatings
- B05D 1/005: {Spin coating}
- B05D 3/0254: {After-treatment}
- G02B 5/0247: {by means of voids or pores}
- G02B 5/0278: {used in transmission}
- B82Y 20/00: Nanooptics, e.g. quantum optics or photonic crystals
- Y10S 977/834: Optical properties of nanomaterial, e.g. specified transparency, opacity, or index of refraction
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- B05D: PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (conveying articles or workpieces through baths of liquid B65G, e.g. B65G49/02)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

Provided are an optical member having abrasion resistance and transparency and a method of producing the optical member. The method of producing the optical member includes coating a coating material containing hollow particles and a solvent on a substrate and further coating a coating material containing a binder and a solvent to form a film in which the binder lies between the hollow particles; and then drying the film.

## Claims

### Claim 1

A method of producing an optical member, comprising:
forming an antireflection film on a substrate, wherein forming the antireflection film comprises:
coating a liquid having particles dispersed in a dispersion medium and then coating a solution containing a component necessary for forming a binder to form a layer in which spaces between the particles are filled with the binder; and
drying the layer.

### Claim 2 (depends on 1)

The method of producing an optical member according to claim 1, wherein the component necessary for forming a binder is an alkoxysilane hydrolysis-condensation product.

### Claim 3 (depends on 1)

The method of producing an optical member according to claim 1, wherein coating of the liquid having particles dispersed in a dispersion medium and coating of the solution containing a component necessary for forming a binder are performed by spin coating.

### Claim 4 (depends on 1)

The method of producing an optical member according to claim 1, wherein the dispersion medium contains any one of 1-methoxy-2-propanol, methyl cellosolve, ethyl cellosolve, and butyl cellosolve.

### Claim 5 (depends on 1)

The method of producing an optical member according to claim 1, wherein the particles are hollow particles containing silica.

### Claim 6 (depends on 1)

The method of producing an optical member according to claim 1, wherein forming the antireflection film further comprises forming another layer in addition to the layer in which the binder lying between the particles.

### Claim 7 (depends on 6)

The method of producing an optical member according to claim 6, wherein forming another layer is performed by deposition of zirconium oxide, titanium oxide, tantalum oxide, niobium oxide, hafnium oxide, alumina, silica, or magnesium fluoride.

### Claim 8

An optical member comprising an antireflection film formed on a substrate, wherein
the antireflection film has a layer formed of multi-stacked particles aligned in the direction parallel to the substrate surface; and
spaces between the particles in the layer are filled with the binder.

### Claim 9 (depends on 8)

The optical member according to claim 8, wherein the layer includes the particles at a two-dimensional density of 0.8 or more and 0.88 or less.

### Claim 10 (depends on 8)

The optical member according to claim 8, wherein the binder has a void, and the volume ratio of the void to the layer is 5 vol % or more and 25 vol % or less.

### Claim 11 (depends on 8)

The optical member according to claim 8, wherein the particles are hollow particles containing silica.

### Claim 12 (depends on 11)

The optical member according to claim 11, wherein the layer has a thickness d:
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(wherein, a represents average particle radius of the hollow particles; and n represents a positive integer).

### Claim 13 (depends on 11)

The optical member according to claim 11, wherein the layer has a thickness of 60 nm or more and 200 nm or less.

### Claim 14 (depends on 11)

The optical member according to claim 11, wherein the hollow particles have an average particle diameter of 15 nm or more and 100 nm or less.

### Claim 15 (depends on 12)

The optical member according to claim 12, wherein the hollow particles each has a shell having a thickness of 10% or more and 50% or less of the average particle diameter.

### Claim 16 (depends on 8)

The optical member according to claim 8, wherein the antireflection film further includes a monolayer or a multilayer.