# US 2014/0153098 A1 · Optical filter and optical module having optical filter

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- Number: US 2014/0153098 A1
- Document ID: US20140153098A1
- Status: Published application
- Kind: A1
- Application number: 14/176,615
- Filed: 2014-02-10
- Published: 2014-06-05
- Earliest claimed: 2009-12-01
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Yuki HANAMURA; Takeo FUNAKAWA; Tsukasa FUNASAKA
- Web page: https://patentgrep.com/patent/US20140153098A1

## CPC

- G02B 26/001: {based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26)}
- G02B 5/284: {of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates (etalons for fibre optic multiplexing G02B6/29358; etalons for spectral measurement G01J3/26)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An optical filter includes a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, a second mirror formed on the concave portion and facing the first mirror, and an electrode formed on the second substrate and around the second mirror. The first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions.

## Claims

### Claim 1

An optical filter comprising:
a first substrate;
a first mirror formed on the first substrate;
a second substrate coupled to the first substrate, the second substrate including a concave portion;
a second mirror formed on the concave portion and facing the first mirror; and
an electrode formed on the second substrate and around the second mirror,
wherein the first substrate includes a plurality of first hinge portions and a plurality of second hinge portions inside the plurality of first hinge portions.

### Claim 2 (depends on 1)

The optical filter according to claim 1, wherein at least one of the plurality of the first hinge portions has a first beam width,
wherein at least one of the plurality of the second hinge portions has a second beam width, and
wherein the first beam width is equal to or larger than the second beam width.

### Claim 3 (depends on 1)

The optical filter according to claim 1, wherein the at least one of the first and second substrates is made of semiconductor material.

### Claim 4 (depends on 1)

An optical module having the optical filter according to claim 1.