# US 2014/0153001 A1 · Gimbaled scanning mirror array > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0153001 A1 - Document ID: US20140153001A1 - Status: Published application - Kind: A1 - Application number: 13/798,251 - Filed: 2013-03-13 - Published: 2014-06-05 - Earliest claimed: 2012-03-22 - Assignees: Primesense Ltd. - Inventors: Naftali Chayat; Yuval Gerson - Web page: https://patentgrep.com/patent/US20140153001A1 ## CPC - G01B 11/24: for measuring contours or curvatures - G01S 7/4817: {relating to scanning} - G01S 17/10: using transmission of interrupted, pulse-modulated waves (determination of distance by phase measurements G01S17/32) - G01S 17/42: Simultaneous measurement of distance and other co-ordinates (indirect measurement G01S17/46) - G01S 17/89: for mapping or imaging - G02B 26/085: {the reflecting means being moved or deformed by electromagnetic means} - G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)} - G02B 26/105: {with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence)} - H10W 95/00: Packaging processes not covered by the other groups of this subclass - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS - G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract An optical scanning device includes a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors. Respective spindles connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes. ## Claims ### Claim 1 An optical scanning device, comprising a substrate, which is etched to define: an array of two or more parallel micromirrors; a support surrounding the micromirrors; respective spindles connecting the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support; and one or more flexible coupling members, which are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes. ### Claim 2 (depends on 1) The device according to claim 1, wherein the substrate is etched to separate the support from the substrate surrounding the support, and to define further spindles connecting the support to the substrate, thereby providing a further axis of rotation of the support, which is perpendicular to the axes of rotation of the micromirrors. ### Claim 3 (depends on 1) The device according to claim 1, wherein the one or more flexible coupling members comprise a belt, which is etched from the substrate and has first and second ends attached respectively to first and second ones of the micromirrors and is anchored to the support at a point between the first and second ends. ### Claim 4 (depends on 3) The device according to claim 3, wherein the belt is thinned relative to the substrate. ### Claim 5 (depends on 1) The device according to claim 1, wherein the one or more flexible coupling members are coupled so as to cause the micromirrors to oscillate in phase, so that the micromirrors have the same angular orientation during oscillation. ### Claim 6 (depends on 1) The device according to claim 1, wherein the one or more flexible coupling members are coupled so as to cause the micromirrors to oscillate in anti-phase. ### Claim 7 (depends on 1) The device according to claim 1, and comprising a reflective coating applied to the substrate on the micromirrors. ### Claim 8 (depends on 1) The device according to claim 1, wherein the substrate is a part of a silicon wafer. ### Claim 9 (depends on 1) The device according to claim 1, and comprising an electromagnetic drive, which is coupled to drive the micromirrors to oscillate about the respective parallel axes. ### Claim 10 Scanning apparatus, comprising: a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors, wherein the micromirrors are coupled to rotate in mutual synchronization about respective parallel first axes of rotation relative to the support while the support rotates about a second axis relative to the substrate; and an electromagnetic drive, which is coupled to cause the micromirrors and the support to rotate respectively about the first and second axes. ### Claim 11 (depends on 10) The apparatus according to claim 10, wherein the electromagnetic drive comprises: a stator assembly, comprising at least one magnetic core having an air gap and at least one coil wound on the magnetic core; and at least one rotor, on which the support is mounted and which is suspended in the air gap so as to move within the air gap in response to a current driven through the at least one coil. ### Claim 12 (depends on 11) The apparatus according to claim 11, wherein the support has a pair of wings, each connected to the substrate by a respective spindle, and wherein the at least one rotor comprises a pair of permanent magnets, each connected to a respective one of the wings. ### Claim 13 (depends on 11) The apparatus according to claim 11, wherein the electromagnetic drive and the current are configured to cause the micromirrors to rotate about the first axes at a first frequency, which is a resonant frequency of rotation, while causing the support to rotate about the second axis at a second frequency, which is lower than the first frequency. ### Claim 14 (depends on 10) The apparatus according to claim 10, wherein the substrate is etched to define: respective first spindles connecting the micromirrors to the support, thereby defining the respective parallel first axes of rotation of the micromirrors relative to the support; one or more flexible coupling members, which are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective first axes; and second spindles connecting the support to the substrate along the second axis. ### Claim 15 (depends on 10) The apparatus according to claim 10, and comprising: a transmitter, which is configured to emit a beam comprising pulses of light toward the micromirror array while the micromirrors and the support rotate, so as to cause the micromirrors to scan the beam over a scene; a receiver, which is configured to receive, by reflection from the micromirror array, the light reflected from the scene and to generate an output indicative of a time of flight of the pulses to and from points in the scene; and a controller, which is coupled to process the output of the receiver during a scan of the beam so as to generate a three-dimensional map of the scene. ### Claim 16 A method for producing an optical scanning device, the method comprising etching a substrate so as to define: an array of two or more parallel micromirrors; a support surrounding the micromirrors; respective spindles connecting the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support; and one or more flexible coupling members, which are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes. ### Claim 17 (depends on 15) The method according to claim 15, wherein the substrate is a part of a silicon wafer. ### Claim 18 A method for scanning, comprising: providing a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors; driving the micromirrors to rotate in mutual synchronization about respective parallel first axes of rotation relative to the support while driving the support to rotate about a second axis relative to the substrate; and directing a beam of light toward the micromirror array while the micromirrors and the support rotate, so as to cause the micromirrors to scan the beam over a scene. ### Claim 19 (depends on 18) The method according to claim 18, wherein directing the beam comprises directing pulses of the light toward the micromirror array, and wherein the method comprises: receiving, by reflection from the micromirror array, the light reflected from the scene; generating an output indicative of a time of flight of the pulses to and from points in the scene; and processing the output during a scan of the beam so as to generate a three-dimensional map of the scene. ### Claim 20 (depends on 18) The method according to claim 18, wherein the substrate is etched to define: respective first spindles connecting the micromirrors to the support, thereby defining the respective parallel first axes of rotation of the micromirrors relative to the support; one or more flexible coupling members, which are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective first axes; and second spindles connecting the support to the substrate along the second axis. ### Claim 21 (depends on 18) The method according to claim 18, wherein driving the mirrors comprises applying a current to an electromagnetic drive, which is coupled to the micromirror array, so as to cause the micromirrors to rotate about the first axes at a first frequency, which is a resonant frequency of rotation, while causing the support to rotate about the second axis at a second frequency, which is lower than the first frequency.