# US 2014/0152980 A1 · Inspection device for substrate deformation at high temperatures and inspection method for substrate deformation at high temperatures using the same

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- Number: US 2014/0152980 A1
- Document ID: US20140152980A1
- Status: Published application
- Kind: A1
- Application number: 13/772,491
- Filed: 2013-02-21
- Published: 2014-06-05
- Earliest claimed: 2012-12-03
- Assignees: Samsung Electro-Mechanics Co., Ltd.
- Applicants: Samsung Electro-Mechanics Co., Ltd.
- Inventors: Gyu Seok KIM; Hee Suk CHUNG; Suk Jin HAM; Dong Yong KIM; Yong Choon PARK; Mi Yang KIM; Tae Yoon KIM
- Web page: https://patentgrep.com/patent/US20140152980A1

## CPC

- G01N 1/28: Preparing specimens for investigation {including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q}(mounting specimens on microscopic slides G02B21/34; means for supporting the objects or the materials to be analysed in electron microscopes H01J37/20 {; laboratory gas handling apparatus B01L5/00})
- G01M 99/002: {Thermal testing (flaw detection G01N25/72)}
- G01N 3/60: Investigating resistance of materials, e.g. refractory materials, to rapid heat changes {(thermal testing of structures or apparatus G01M99/002)}
- G01N 2203/0023: Bending
- G01N 2203/0282: Two dimensional, e.g. tapes, webs, sheets, strips, disks or membranes
- G01N 2203/0647: Image analysis
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- G01M: TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR

## Abstract

There are provided an inspection device for substrate deformation at high temperatures and an inspection method for substrate deformation at high temperatures, the inspection device for substrate deformation at high temperatures, including a crucible including an internal space, an inspection hole disposed in an upper portion thereof so as to inspect the internal space, and a heating unit heating the internal space, an indenter tip disposed in the crucible such that a substrate fixed to the internal space is warped, and an inspection unit disposed above the crucible so as to inspect a cross-section of the substrate.

## Claims

### Claim 1

An inspection device for substrate deformation at high temperatures, comprising:
a crucible including an internal space, an inspection hole disposed in an upper portion thereof so as to inspect the internal space, and a heating unit heating the internal space;
an indenter tip disposed in the crucible such that a substrate fixed to the internal space is warped; and
an inspection unit disposed above the crucible so as to inspect a cross-section of the substrate.

### Claim 2 (depends on 1)

The inspection device of claim 1, wherein the inspection hole is covered with a transparent window.

### Claim 3 (depends on 1)

The inspection device of claim 1, wherein the crucible is enclosed by a heat insulation material.

### Claim 4 (depends on 1)

The inspection device of claim 1, further comprising a control unit interconnected with the indenter tip to control movements of the indenter tip.

### Claim 5 (depends on 4)

The inspection device of claim 4, wherein the control unit determines force applied to the indenter tip according to displacement of the indenter tip and determines correlation therebetween to store determined results in a memory.

### Claim 6 (depends on 4)

The inspection device of claim 4, wherein the control unit controls an objective lens of the inspection unit to move toward a target cross-section of the substrate and allows data inspected by the inspection unit to be stored in a memory.

### Claim 7 (depends on 4)

The inspection device of claim 4, wherein the control unit controls the heating unit to heat the internal space to a target temperature.

### Claim 8 (depends on 1)

The inspection device of claim 1, wherein the crucible is provided with seating grooves opposing each other and having both ends of the substrate fitted therein to be fixed thereto.

### Claim 9

An inspection method for substrate deformation at high temperatures, the inspection method comprising:
heating a crucible including an internal space having a substrate mounted therein and polished so as to expose a target cross-section of the substrate, to a target temperature;
warping the target cross-section of the substrate to a target displacement by an indenter tip disposed in the crucible; and
inspecting the target cross-section by an inspection unit.

### Claim 10 (depends on 9)

The inspection method of claim 9, wherein the target displacement is a difference between degrees of deformation in the target cross-section of the substrate before the substrate is polished and the target cross-section of the substrate after the substrate is polished, at the target temperature.

### Claim 11 (depends on 10)

The inspection method of claim 10, wherein the target cross-section includes a central portion of the substrate before the substrate is polished.

### Claim 12 (depends on 9)

The inspection method of claim 9, wherein the warping includes measuring force applied to move the substrate by an amount equal to the target displacement by the indenter tip.