# US 2014/0152967 A1 · Source-collector module wth GIC mirror and LPP EUV light source

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- Number: US 2014/0152967 A1
- Document ID: US20140152967A1
- Status: Published application
- Kind: A1
- Application number: 13/691,804
- Filed: 2012-12-02
- Published: 2014-06-05
- Earliest claimed: 2012-12-02
- Assignees: Media Lario S.R.L.
- Inventors: Natale M. Ceglio; Giovanni Nocerino; Fabio Zocchi
- Web page: https://patentgrep.com/patent/US20140152967A1

## CPC

- G03F 7/70033: {by plasma extreme ultraviolet [EUV] sources}
- G03F 7/2004: {characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light}
- G21K 1/067: {using surface reflection, e.g. grazing incidence mirrors, gratings (multilayer mirrors G21K1/062)}
- G21K 2201/064: having a curved surface
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- G21K: HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES

## Abstract

A source-collector module for an extreme ultraviolet (EUV) lithography system, the module including a laser-produced plasma (LPP) that generates EUV radiation and a grazing-incidence collector (GIC) mirror arranged relative thereto and having an input end and an output end. The LPP is formed using an LPP target system wherein a pulsed laser beam travels on-axis through the GIC and is incident upon solid, moveable LPP target. The GIC mirror is arranged relative to the LPP to receive the EUV radiation therefrom at its input end and focus the received EUV radiation at an intermediate focus adjacent the output end. An example GIC mirror design is presented that includes a polynomial surface-figure correction to compensate for GIC shell thickness effects, thereby improve far-field imaging performance.

## Claims

### Claim 1

A source-collector module for an extreme ultraviolet (EUV) lithography system, comprising:
a laser that generates along a source-collector module axis a pulsed laser beam having a series of pulses;
a solid laser-produced plasma (LPP) target having a moving target surface configured to receive the pulsed laser beam with each laser pulse being incident upon the target surface at a different location to create a LPP that generates EUV radiation and debris; and
a grazing-incidence collector (GIC) mirror having an input end and an output end and arranged to receive the EUV radiation at the input end and focus the received EUV radiation at an intermediate focus adjacent the output end;
a debris mitigation device operably disposed between the solid LPP target and the input end of the GIC mirror to substantially prevent the debris from reaching the GIC mirror; and
a radiation-collection enhancement device disposed between the GIC mirror output end and the intermediate focus and configured to direct EUV radiation to the focus spot.

### Claim 2 (depends on 1)

The source-collector module of claim 1, wherein the debris mitigation device comprises a plurality of radial lamellas that rotate to intercept the debris as the debris travels from the LPP to the GIC mirror.

### Claim 3 (depends on 1)

The source-collector module of claim 1, wherein the GIC mirror provides a first reflecting surface that does not have a multilayer coating covering a significant portion of the first reflecting surface.

### Claim 4 (depends on 1)

The source-collector module of claim 1, wherein the GIC mirror includes a Ru coating.

### Claim 5 (depends on 1)

The source-collector module of claim 1, wherein the GIC mirror includes a multilayer coating.

### Claim 6 (depends on 1)

The source-collector module of claim 1, wherein the GIC mirror includes at least one segmented GIC shell having the first reflecting surface and a second reflecting surface, with the second reflecting surface having a multilayer coating.

### Claim 7 (depends on 1)

The source-collector module of claim 1, wherein the laser beam travels through the GIC from the output end to the input end, through the debris mitigation device and then to the LPP target surface.

### Claim 8 (depends on 1)

The source-collector module of claim 1, wherein the LPP target surface includes a coating of LPP-generating material formed atop a substrate.

### Claim 9 (depends on 1)

The source-collector module of claim 1, wherein the LPP target surface includes one of Sn and Xe.

### Claim 10 (depends on 1)

An extreme ultraviolet (EUV) lithography system for illuminating a reflective reticle, comprising:
the source-collector module of claim 1;
an illuminator configured to receive the focused EUV radiation formed at the intermediate focus and form condensed EUV radiation for illuminating the reflective reticle.

### Claim 11 (depends on 10)

The EUV lithography system of claim 10 for forming a patterned image on a photosensitive semiconductor wafer, further comprising:
a projection optical system arranged downstream of the reflective reticle and configured to receive reflected EUV radiation from the reflective reticle and form therefrom the patterned image on the photosensitive semiconductor wafer.