# US 2014/0152153 A1 · Piezoelectric resonating device, manufacturing method thereof, piezoelectric resonator, and piezoelectric oscillator > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0152153 A1 - Document ID: US20140152153A1 - Status: Published application - Kind: A1 - Application number: 14/177,505 - Filed: 2014-02-11 - Published: 2014-06-05 - Earliest claimed: 2010-12-02 - Assignees: Seiko Epson Corporation - Applicants: Seiko Epson Corporation - Inventors: Akinori YAMADA - Web page: https://patentgrep.com/patent/US20140152153A1 ## CPC - H03H 9/21: Crystal tuning forks - H03H 9/215: consisting of quartz - Y10T 29/42: Piezoelectric device making - H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P) - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A piezoelectric substrate includes rod-shaped resonating arms; a base portion that connects one set of end portions of the respective resonating arms; weight portions which are formed on the other end portions of the respective resonating arms and which have a width larger than that of the respective resonating arms; and groove portions which are formed on each of the front and rear surfaces along the center line of vibration of the respective resonating arms. The piezoelectric substrate also includes excitation electrodes which are formed on each of the front and rear surfaces of the respective resonating arms including the inner side of the respective groove portions. A plurality of frequency adjustment slits extending in a straight line form along the longitudinal direction of the respective resonating arms are formed on the respective weight portions so as to penetrate through the front and rear surfaces of the weight portions. ## Claims ### Claim 1 A resonating device comprising: a pair of resonating arms that extend in a first direction, each of the pair of resonating arms having first and second surfaces opposite to each other; a base connected to first ends of the pair of resonating arms; and a plurality of slits that are formed in the pair of resonating arms, wherein the plurality of slits are formed from the first surface to the second surface so as to penetrate the pair of resonating arms, and the plurality of slits linearly extend in the first direction. ### Claim 2 (depends on 1) The resonating device according to claim 1, wherein the plurality of slits are formed in a second direction perpendicular to the first direction. ### Claim 3 (depends on 2) The resonating device according to claim 2, wherein all of the plurality of slits have the same width in the second direction. ### Claim 4 (depends on 3) The resonating device according to claim 3, wherein all of the plurality of slits have the same length in the first direction. ### Claim 5 (depends on 1) The resonating device according to claim 1, wherein a first edge of one of the plurality of slits located next to the first end of one of the pair of resonating arms and a second edge of one of the plurality of slits located next to the first end of the other of the pair of resonating arms are on a first same line in a second direction perpendicular to the first direction, and a third edge of one of the plurality of slits located next to a second end, which is opposite to the first end, of the one of the pair of resonating arms and a fourth end of one of the plurality of slits located next to the second end of the other of the pair of resonating arms are on a second same line in the second direction. ### Claim 6 (depends on 2) The resonating device according to claim 2, wherein a first edge of one of the plurality of slits located next to the first end of one of the pair of resonating arms and a second edge of one of the plurality of slits located next to the first end of the other of the pair of resonating arms are on a first same line in a second direction perpendicular to the first direction, and a third edge of one of the plurality of slits located next to the second end of the one of the pair of resonating arms and a fourth end of one of the plurality of slits located next to the second end of the other of the pair of resonating arms are on a second same line in the second direction. ### Claim 7 (depends on 4) The resonating device according to claim 4, wherein a first edge of one of the plurality of slits located next to the first end of one of the pair of resonating arms and a second edge of one of the plurality of slits located next to the first end of the other of the pair of resonating arms are on a first same line in a second direction perpendicular to the first direction, and a third edge of one of the plurality of slits located next to a second end of the one of the pair of resonating arms and a fourth end of one of the plurality of slits located next to the second end of the other of the pair of resonating arms are on a second same line in the second direction. ### Claim 8 (depends on 1) The resonating device according to claim 1, wherein each of the pair of resonating arms includes a weight, and an arm member that is located between the base and the weight, and the plurality of slits are formed in the weight. ### Claim 9 (depends on 2) The resonating device according to claim 2, wherein each of the pair of resonating arms include a weight, and an arm member that is located between the base and the weight, and the plurality of slits are formed in the weight. ### Claim 10 (depends on 4) The resonating device according to claim 4, wherein each of the pair of resonating arms include a weight, and an arm member that is located between the base and the weight, and the plurality of slits are formed in the weight. ### Claim 11 (depends on 5) The resonating device according to claim 5, wherein each of the pair of resonating arms include a weight, and an arm member that is located between the base and the weight, and the plurality of slits are formed in the weight. ### Claim 12 (depends on 1) A resonator comprising: the resonating device according to claim 1; and a package in which the resonating device is accommodated. ### Claim 13 (depends on 2) A resonator comprising: the resonating device according to claim 2; and a package in which the resonating device is accommodated. ### Claim 14 (depends on 4) A resonator comprising: the resonating device according to claim 4; and a package in which the resonating device is accommodated. ### Claim 15 (depends on 1) An oscillator comprising: the resonating device according to claim 1; and an integrated circuit that controls the resonating device. ### Claim 16 (depends on 2) An oscillator comprising: the resonating device according to claim 2; and an integrated circuit that controls the resonating device. ### Claim 17 (depends on 4) An oscillator comprising: the resonating device according to claim 4; and an integrated circuit that controls the resonating device. ### Claim 18 (depends on 1) A gyro device comprising: the resonating device according to claim 1. ### Claim 19 (depends on 2) A gyro device comprising: the resonating device according to claim 2. ### Claim 20 (depends on 4) A gyro device comprising: the resonating device according to claim 4.