# US 2014/0152151 A1 · Device for Precision Displacement > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0152151 A1 - Document ID: US20140152151A1 - Status: Published application - Kind: A1 - Application number: 14/122,976 - Filed: 2011-06-28 - Published: 2014-06-05 - Earliest claimed: 2011-06-01 - Inventors: Alexander Potemkin; Petr Nikolaevich Luskinovich; Vladimir Alexandrovich Zhabotinsky - Web page: https://patentgrep.com/patent/US20140152151A1 ## CPC - H10N 30/20: with electrical input and mechanical output, e.g. functioning as actuators or vibrators - H02N 2/02: producing linear motion, e.g. actuators; Linear positioners {; Linear motors} - H10N 30/206: {using only longitudinal or thickness displacement, e.g. d33 or d31 type devices} - H10N 30/208: {using shear or torsion displacement, e.g. d15 type devices} - H10N 30/871: {Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes} - H10N 30/878: {the principal material being non-metallic, e.g. oxide or carbon based} - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ## Abstract A device for performing a precision movement comprising a plate composed of piezoelectric material and comprising electrodes which are provided at mutually opposite and preferably parallel planes, are connectable to a controlled voltage source having electrical voltage and in this case bring about a change in the form and/or mass of the plate is characterized in that at least one of the electrodes is designed in an elastic fashion to form a base module. ## Claims ### Claim 1 A device for performing a precision movement, comprising: a plate made of a piezoelectric material; electrodes arranged parallel to one another and configured to be connectable to a voltage source having a controlled electrical voltage sufficient to cause a change in at least one of a form and at least one dimension of the plate; and a top layer that is at least one of a protecting layer and a reading layer is fixed to a free top side of a base module via a non-elastic fixed electrode, wherein at least one of the electrodes is a portion of an elastic base module, the plate is a monocrystalline material having at least one of a low degree of hysteresis and a low degree of creep strain, and an orientation of crystal axes of the monocrystalline material is arranged with respect to planes including the electrodes such that when the controlled electrical voltage is applied, a change in at least one of the form and dimensions of the plates is at least one of perpendicular and parallel to the electrodes. ### Claim at position 2 2-3. (canceled) ### Claim 4 (depends on 1) The device according to claim 1, wherein the plate is formed from at least one of a plurality of stacked, identical plates and base modules having electrodes therebetween, said electrodes being elastic and arranged such that a voltage of equal quantity and direction is applied to each of the electrodes. ### Claim 5 (depends on 1) The device according to claim 1, wherein a bottom layer that is at least one of a protecting layer and a reading layer is fixed to a bottom side of the base module opposite the free top side of the base module via another non-elastic fixed electrode. ### Claim 6 (depends on 1) The device according to claim 1, further comprising: a device bottom; a first console extending at right angles to the device bottom; and a T-shaped second console having a crossbeam portion with the top layer thereon and a web portion adjacent to the crossbeam portion at right angles thereto, wherein the base module is arranged between the web portion of the second console and the first console in a manner that permits the second console to be displaced relative to the first console in response to application of voltage to the based module. ### Claim 7 (depends on 6) The device according to claim 6, wherein the first console is formed in a U-shape with at least one leg of the first console extending at right angles to the device bottom on a side of the second console web portion opposite the base module, and a further base module having a same orientation of crystal axes as the base module is arranged between the at least one leg of the first console on the opposite side of the web portion of the second console and the web portion of the second console such that the plates of the base modules move all in the same direction when voltage is applied. ### Claim 8 (depends on 1) The device according to claim 1, further comprising: a device bottom; an L-shaped first console extending at right angles to the device bottom and having at least one first portion extending parallel to the device bottom; a U-shaped second console having two parallel U-shaped legs interconnected by a U-shaped web portion arranged at right angles to the device bottom, wherein a first leg of the two U-shaped legs closest to the device bottom extends parallel to the first portion of the first console between the device bottom and the first portion, and a second leg of the two U-shaped legs the second U-shaped leg extends parallel to the first portion of the first console on a side of the first portion facing away from the device bottom, the base module (10) is arranged between the first leg of the second console and the first portion of the first console that is parallel to the device base, and a further base module having the same orientation of crystal axes as the base module is arranged between a side of the second leg of the two U-shaped legs facing away from the device bottom and the top layer such that a movement of the plates parallel to the first portion of the first console and the two U-shaped legs occurs in a same direction at right angles thereto when voltage is applied. ### Claim 9 (depends on 1) The device according to claim 1, wherein an intermediate layer is arranged between the top layer and a top side of a topmost layer of the base module electrodes facing the top layer, temperature coefficients expansion of the device bottom and the intermediate layer (8) correspond to one another, and a plurality of base modules having the same orientation of crystal axes are arranged between the device bottom and the intermediate layer at an intermediate distance between each of the plurality of base modules in a direction parallel to the device bottom. ### Claim 10 (depends on 9) The device according to claim 9, wherein a mark is attached to top layer. ### Claim 11 (depends on 9) The device according to claim 9, wherein at least one gap is formed between at least one intermediate space between pairs of the plurality of base modules through the intermediate layer (8) and the top layer.