# US 2014/0152147 A1 · Method for controlling an inertial drive

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- Number: US 2014/0152147 A1
- Document ID: US20140152147A1
- Status: Published application
- Kind: A1
- Application number: 14/005,195
- Filed: 2012-02-28
- Published: 2014-06-05
- Earliest claimed: 2011-03-14
- Assignees: Smaract Holding GmbH
- Inventors: Christoph Rass; Axel Kortschack
- Web page: https://patentgrep.com/patent/US20140152147A1

## CPC

- H02N 2/06: Drive circuits; Control arrangements {or methods}
- H02N 2/067: {generating drive pulses}
- H02N 2/025: {Inertial sliding motors}
- H02N 2/101: {using intermittent driving, e.g. step motors}
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

## Abstract

A method for controlling an inertial drive on the basis of pulse trains is disclosed. The pulse trains include pulses having sections of different gradients and having variable amplitude and/or frequency. A pulse interval occurs between the individual pulses, wherein the selected pulse duration is so short that is substantially less than the cycle duration of the natural oscillation of the system to be driven.

## Claims

### Claim 1

A method for controlling an inertial drive, on the basis of pulse trains that include sections having different gradients and having variable amplitude and frequency, the method comprising:
providing pulse intervals of variable lengths between individual pulses, wherein a selected pulse duration is substantially less than a cycle duration of a natural oscillation of the system to be driven.

### Claim 2 (depends on 1)

The method according to claim 1, wherein each pulse comprises a sequence having slowly rising, rapidly falling and slowing rising edges, or having slowly falling, rapidly rising and slowly falling edges.

### Claim 3 (depends on 1)

The method according to claim 1, further comprising:
maintaining a constant pulse duration; and
determining a step frequency of a drive by the variable lengths of the pulse intervals.

### Claim 4 (depends on 3)

The method according to claim 3 further comprising, when the drive changes direction, adjusting amplitude values to compensate for changing step sizes.

### Claim 5 (depends on 4)

The method according to claim 4 further comprising readjusting the amplitude values to keep the step size constant.

### Claim 6 (depends on 5)

The method according to claim 5, further comprising dynamically controlling the amplitude to maintain small step sizes less than 5 nm.

### Claim 7 (depends on 6)

The method according to claim 6, further comprising
setting a drive speed based on a product of the step frequency and the step size; and
filtering out resonant frequencies of the system to be driven.

### Claim 8 (depends on 1)

The method according to claim 1, further comprising compensating mechanical and electrical properties of the system to be driven by pulse asymmetry in the respective pulse trains used for control.

### Claim 9 (depends on 4)

The method according to claim 4, further comprising
correcting frequency-dependent variations in the step size by making adjustments to control amplitudes; and
correcting the adjustments anticipatively, using a recorded series of measurements.

### Claim 10 (depends on 4)

The method according to claim 4, further comprising
correcting frequency-dependent variations in the step size by making adjustments to control amplitudes; and
correcting said adjustments dynamically.

### Claim 11 (depends on 3)

The method according to claim 3 wherein superimposing slow scanning motion and fast pulses permits continuous motion of the drive.

### Claim 12 (depends on 3)

The method according to claim 3 wherein more than one actuator is used per drive, the actuators selectively controllable by a timing offset.

### Claim 13 (depends on 1)

The method according to claim 1 wherein the pulse duration of an individual pulse is less than 50 μs.