# US 2014/0151554 A1 · System and Method for Controlling Charge-up in an Electron Beam Apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0151554 A1 - Document ID: US20140151554A1 - Status: Published application - Kind: A1 - Application number: 14/081,465 - Filed: 2013-11-15 - Published: 2014-06-05 - Earliest claimed: 2012-11-19 - Assignees: Hermes Microvision, Inc. - Applicants: Hermes Microvision, Inc. - Inventors: Weiming Ren; Zhongwei Chen - Web page: https://patentgrep.com/patent/US20140151554A1 ## CPC - H01J 37/026: {Means for avoiding or neutralising unwanted electrical charges on tube components} - H01J 37/14: magnetic - H01J 37/261: {Details} - H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} - H01J 2237/0045: using secondary electrons - H01J 2237/0262: electrostatic - H01J 2237/1405: Constructional details - H01J 2237/2801: Details - H01J 2237/2803: characterised by the imaging method - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract The present invention provides means and corresponding embodiments to control charge-up in an electron beam apparatus, which can eliminate the positive charges soon after being generated on the sample surface within a frame cycle of imaging scanning. The means are to let some or all of secondary electrons emitted from the sample surface return back to neutralize positive charges built up thereon so as to reach a charge balance within a limited time period. The embodiments use control electrodes to generate retarding fields to reflect some of secondary electrons with low kinetic energies back to the sample surface. ## Claims ### Claim 1 An objective lens of a scanning electron microscope, comprising: a magnetic objective lens; and a control electrode between said magnetic objective lens and a surface of a sample to be observed, wherein said control electrode is biased a voltage with respect to said sample, wherein during each period of line-scanning within a frame cycle of imaging scanning, said voltage is set at a first value so as to generate an electrostatic extraction field on said surface, wherein during each period of beam-retracing within said frame cycle of imaging scanning, said voltage is set at a second value so as to generate an electrostatic reflection field above said surface. ### Claim 2 (depends on 1) The objective lens according to claim 1, wherein a primary electron beam of said scanning electron microscope is not blanked out during said each period of beam-retracing. ### Claim 3 (depends on 2) The objective lens according to claim 2, wherein on said surface, a path of said primary electron beam during said each period of beam-retracing covers a path thereof during a latest period of line-scanning. ### Claim 4 (depends on 3) The objective lens according to claim 3, wherein said second value is chosen so that said electrostatic reflection field reflects a desired amount of secondary electrons emitted from said surface back to said surface to make a charge balance thereon. ### Claim 5 An objective lens of a scanning electron microscope for observing a surface of a sample, comprising: a magnetic objective lens; a first control electrode below said magnetic objective lens; and a second control electrode below said first control electrode and above said surface, wherein said first control electrode and said second control electrode are biased a first voltage and a second voltage with respect to said sample respectively, wherein during each period of line-scanning within a frame cycle of imaging scanning, said first voltage and said second voltage are respectively set at a first value u1 and a third value u3 so as to generate an electrostatic extraction field on said surface, wherein during each period of beam-retracing within said frame cycle of imaging scanning, said first voltage and said second voltage are respectively set at a second value u2 and a fourth value u4 so as to generate an electrostatic reflection field above said surface. ### Claim 6 (depends on 5) The objective lens according to claim 5, wherein a primary electron beam of said scanning electron microscope is not blanked out during said each period of beam-retracing. ### Claim 7 (depends on 6) The objective lens according to claim 6, wherein on said surface, a path of said primary electron beam during said each period of beam-retracing covers a path thereof during a latest period of line-scanning. ### Claim 8 (depends on 7) The objective lens according to claim 7, wherein said second value u2 and fourth value u4 are chosen so that said electrostatic reflection field reflects a desired amount of secondary electrons emitted from said surface back to said surface to make a charge balance thereon. ### Claim 9 (depends on 7) The objective lens according to claim 7, wherein said second value u2 is set equal to said first value u1. ### Claim 10 (depends on 7) The objective lens according to claim 7, wherein said fourth value u4 is set equal to said third value u3. ### Claim 11 An objective lens of a scanning electron microscope for observing a surface of a sample, comprising: a magnetic objective lens; a first control electrode under said magnetic objective lens; and a second control electrode under said first control electrode and above said surface, wherein said first control electrode and said second control electrode are biased a first voltage and a second voltage with respect to said sample respectively, wherein said second voltage is set at an extractive value so as to generate an electrostatic extraction field on said surface, wherein said first voltage is set at a reflective value so as to generate an electrostatic reflection field to reflect an amount of secondary electrons emitted from said surface back to said surface to make a charge balance thereon. ### Claim 12 An electron beam apparatus, comprising: an electron source, which emits primary electrons along a direction, wherein said direction is an optical axis of said electron beam apparatus and said primary electrons form a primary electron beam; a condenser lens, which is located below said electron source and aligned with said optical axis; a beam-limit aperture plate, which is located below said electron source and comprises at least one opening, wherein one opening is aligned with said optical axis and limits a current of said primary charged particle beam; a magnetic objective lens, which is located below said beam-limit aperture plate and condenser lens and aligned with said optical axis; a control electrode, which is located below said magnetic objective lens and aligned with said optical axis; a sample stage, which is located below said control electrode and supports a sample, wherein an interested surface thereof is placed upwards and said control electrode is biased a voltage with respect to said sample; a deflection unit, which is above said control electrode and deflects said primary electron beam so as to scan said interested surface in a raster way within a frame cycle of imaging scanning, wherein said frame cycle of imaging scanning comprises a series of alternately distributing periods of line-scanning and beam-retracing, wherein on said interested surface, a path of said primary electron beam during said each period of beam-retracing covers a path thereof during a latest period of line-scanning; and an electron detector, which is located above said deflection unit and below said beam-limit aperture plate, comprises a hole aligned with said optical axis for said primary electron beam passing therethrough and a detection area facing to said interested surface so as to collect a first amount of secondary electrons emitted therefrom, wherein said primary electron beam is not blanked out during said each period of beam-retracing, wherein during said each period of line-scanning, said voltage is set at a first value so as to generate an electrostatic extraction field on said interested surface, wherein during said each period of beam-retracing, said voltage is set at a second value so as to generate an electrostatic reflection field which reflects a second amount of said secondary electrons back to said interested surface to make a charge balance thereon. ### Claim 13 An electron beam apparatus, comprising: an electron source, which emits primary electrons along a direction, wherein said direction is an optical axis of said electron beam apparatus and said primary electrons form a primary electron beam; a condenser lens, which is located below said electron source and aligned with said optical axis; a beam-limit aperture plate, which is located below said electron source and comprises at least one opening, wherein one opening is aligned with said optical axis and limits a current of said primary charged particle beam; a magnetic objective lens, which is located below said beam-limit aperture plate and said condenser lens and aligned with said optical axis; a first control electrode, which is located below said magnetic objective lens and aligned with said optical axis; a second control electrode, which is located below both said magnetic objective lens and said first control electrode, above said interested surface and aligned with said optical axis; a sample stage, which is located below said second control electrode and supports a sample, wherein an interested surface thereof is placed upwards; a deflection unit, which is above said first control electrode and deflects said primary electron beam so as to scan said interested surface in a raster way within a frame cycle of imaging scanning, wherein said frame cycle of imaging scanning comprises a series of alternately distributing periods of line-scanning and beam-retracing, wherein on said interested surface, a path of said primary electron beam during said each period of beam-retracing covers a path thereof during a latest period of line-scanning; and an electron detector, which is below said beam-limit aperture plate, comprising a hole aligned with said optical axis for said primary electron beam passing therethrough and a detection area facing to said interested surface so as to collect a first amount of secondary electrons emitted therefrom, wherein said first and second control electrodes are biased a first voltage and a second voltage with respect to said sample respectively, wherein during said each period of line-scanning, said first voltage and said second voltage are respectively set at a first value and a third value so as to generate an electrostatic extraction field on said surface, wherein during said each period of beam-retracing, said first voltage and said second voltage are respectively set at a second value and a fourth value so as to generate an electrostatic reflection field above said surface. ### Claim 14 An electron beam apparatus, comprising: an electron source, which emits primary electrons along a direction, wherein said direction is an optical axis of said electron beam apparatus and said primary electrons form a primary electron beam; a condenser lens, which is located below said electron source and aligned with said optical axis; a beam-limit aperture plate, which is located below said electron source and comprises at least one opening, wherein one opening is aligned with said optical axis and limits a current of said primary charged particle beam; a magnetic objective lens, which is located below said beam-limit aperture plate and said condenser lens and aligned with said optical axis; a first control electrode, which is located below said magnetic objective lens and aligned with said optical axis; a second control electrode, which is located below said first control electrode and aligned with said optical axis; a sample stage, which is located below said second control electrode and supports a sample, wherein an interested surface thereof is placed upwards and said first and second control electrodes are biased a first voltage and a second voltage with respect to said sample respectively; a deflection unit, which is above said first control electrode and deflects said primary electron beam so as to scan said interested surface; and an electron detector, which is below said beam-limit aperture plate, comprising a hole aligned with said optical axis for said primary electron beam passing therethrough and a detection area facing to said interested surface so as to collect a first amount of secondary electrons emitted therefrom, wherein said first and second control electrodes are biased a first voltage and a second voltage with respect to said sample respectively, wherein said second voltage is set to generate an electrostatic extraction field on said sample surface, wherein said first voltage is set to generate an electrostatic reflection field which reflects a second amount of said secondary electrons back to said interested surface to make a charge balance thereon. ### Claim 15 A method for eliminating positive charges on a surface of a sample in a scanning electron microscope, comprising: providing an electrostatic extraction field on said surface during a period of line-scanning; providing an electrostatic reflection field above said surface during a period of beam-retracing immediately next to said period of line-scanning; providing a primary electron beam of said scanning electron microscope to said surface during said period of beam-retracing, wherein, on said surface, a path of said primary electron beam during said period of beam-retracing covers a path of said primary electron beam during said period of line-scanning, wherein said electrostatic reflection field reflects a desired amount of secondary electrons emitted from said surface back to said surface to neutralize positive charges on said surface to reach a charge balance thereon. ### Claim 16 A method for eliminating positive charges on a surface of a sample in a scanning electron microscope, comprising: providing an electrostatic extraction field on said surface and an electrostatic reflection field above said surface simultaneously, wherein said electrostatic reflection field reflects a desired amount of secondary electrons emitted from said surface back to said surface to neutralize positive charges on said surface to reach a charge balance thereon.