# US 2014/0151336 A1 · Manufacturing method of liquid discharging head

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- Number: US 2014/0151336 A1
- Document ID: US20140151336A1
- Status: Published application
- Kind: A1
- Application number: 14/089,629
- Filed: 2013-11-25
- Published: 2014-06-05
- Earliest claimed: 2012-11-30
- Assignees: Canon Kabushiki Kaisha
- Applicants: Canon Kabushiki Kaisha
- Inventors: Koji Sasaki; Shuji Koyama; Keiji Matsumoto; Seiichiro Yaginuma
- Web page: https://patentgrep.com/patent/US20140151336A1

## CPC

- B41J 2/1634: {laser machining}
- B41J 2/1603: {of the front shooter type}
- B41J 2/1629: {wet etching}
- B41J 2/1631: {photolithography}
- B41J 2/1639: {sacrificial molding}
- B41J 2/1645: {thin film formation by spincoating}
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS

## Abstract

A manufacturing method of a liquid discharging head includes: preparing a substrate having an energy-generating element and a resin layer on a first face side; irradiating a laser beam on the substrate so as to pass through the resin layer to form a hole serving as a liquid supply port in the substrate; removing a portion of the resin layer including a region which the laser beam has passed through, thereby forming a portion from which the resin layer has been removed as a channel, and forming a portion in which the resin layer remains as a side wall; and forming a discharge port forming member on a far side from the substrate of the side wall, and to form the channel forming member using the side wall and the discharge port forming member.

## Claims

### Claim 1

A manufacturing method of a liquid discharging head including
a substrate, in which a liquid supply port is formed, having an energy-generating element on a first face side, and
a channel forming member configured to form a channel and a discharge port, the method comprising:
preparing the substrate having the energy-generating element and a resin layer on the first face side;
irradiating a laser beam on the substrate so as to pass through the resin layer to form a hole serving as the liquid supply port in the substrate;
removing a portion of the resin layer including a region which the laser beam has penetrated, thereby forming a portion from which the resin layer has been removed as a channel, and forming a portion in which the resin layer remains as a side wall; and
forming a discharge port forming member on a far side from the substrate of the side wall, and to form the channel forming member using the side wall and the discharge port forming member.

### Claim 2 (depends on 1)

The liquid discharging head manufacturing method according to claim 1, wherein the laser beam is irradiated from a second face side which is a rear face side of the first face side to the substrate.

### Claim 3 (depends on 1)

The liquid discharging head manufacturing method according to claim 1, wherein the resin layer is formed of a negative photosensitive resin.

### Claim 4 (depends on 1)

The liquid discharging head manufacturing method according to claim 1, wherein the hole is formed, following which etchant is supplied to this hole.

### Claim 5 (depends on 1)

The liquid discharging head manufacturing method according to claim 1, wherein a sacrificial layer, which is readily subjected to etching as compared to a substrate, is formed on the first face side of the substrate, on which the laser beam is irradiated, thereby penetrating the sacrificial layer using this laser beam.

### Claim 6 (depends on 1)

The liquid discharging head manufacturing method according to claim 1, wherein the resin layer is formed of a negative photosensitive resin, a portion of the resin layer is exposed, thereby forming an exposed region of the resin layer as the side wall, and a region not exposed of the resin layer is removed, and is formed as the channel.

### Claim 7 (depends on 6)

The liquid discharging head manufacturing method according to claim 6, wherein the exposure is performed before a laser beam is irradiated on the substrate.

### Claim 8 (depends on 6)

The liquid discharging head manufacturing method according to claim 6, wherein the exposure is performed after a laser beam is irradiated on the substrate.

### Claim 9 (depends on 1)

The liquid discharging head manufacturing method according to claim 1, wherein the substrate is, at the time of irradiating a laser beam on the substrate, held at a stage having a reflex inhibition region where laser reflectivity is 50% or less, and the laser beam reaches the reflex inhibition region.

### Claim 10 (depends on 1)

The liquid discharging head manufacturing method according to claim 1, wherein the substrate is, at the time of irradiating a laser beam on the substrate, held at a stage where a hollow portion is formed, and the laser beam reaches the hollow portion.