# US 2014/0151325 A1 · Method for manufacturing touch screen panel

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- Number: US 2014/0151325 A1
- Document ID: US20140151325A1
- Status: Published application
- Kind: A1
- Application number: 13/863,636
- Filed: 2013-04-16
- Published: 2014-06-05
- Earliest claimed: 2012-11-30
- Assignees: Samsung Display Co., Ltd.
- Inventors: Sang-Min BAEK
- Web page: https://patentgrep.com/patent/US20140151325A1

## CPC

- G06F 3/0446: {using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes}
- G06F 3/041: Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F 3/04164: {Connections between sensors and controllers, e.g. routing lines between electrodes and connection pads}
- G06F 3/0443: {using a single layer of sensing electrodes}
- G06F 2203/04103: Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)

## Abstract

A method for manufacturing a touch screen panel includes forming first and second conductive layers on a substrate, forming a photosensitive layer on the second conductive layer, exposing the photosensitive layer using a first mask having a first light shielding pattern that corresponds to sensing electrodes and lines to be formed, removing the photosensitive layer at the first exposed portion, sequentially removing the second and first conductive layers at the first exposed portion using the first remaining photosensitive layer as a mask, exposing the photosensitive layer using a second mask having a second light shielding pattern that corresponds to the lines to be formed, removing the photosensitive layer at the second exposed portion, removing the second conductive layer at the second exposed portion using the second remaining photosensitive layer as a mask, thereby forming the sensing electrodes and the lines, and removing the second remaining photosensitive layer.

## Claims

### Claim 1

A method for manufacturing a touch screen panel, the method comprising:
forming a first conductive layer and a second conductive layer on a substrate;
forming a photosensitive layer on the second conductive layer;
exposing the photosensitive layer using a first mask having a first light shielding pattern that corresponds to a position of sensing electrodes and lines to be formed, the exposing providing a first exposed portion;
removing the photosensitive layer at the first exposed portion, the removing providing a first remaining photosensitive layer;
sequentially removing the second and first conductive layers at the first exposed portion using the first remaining photosensitive layer as a mask;
exposing the photosensitive layer using a second mask having a second light shielding pattern that corresponds to the position of the lines to be formed, the exposing providing a second exposed portion;
removing the photosensitive layer at the second exposed portion, the removing providing a second remaining photosensitive layer;
removing the second conductive layer at the second exposed portion using the second remaining photosensitive layer as a mask, thereby forming the sensing electrodes and the lines; and
removing the second remaining photosensitive layer.

### Claim 2 (depends on 1)

The method of claim 1, wherein the photosensitive layer is a positive-type photosensitive layer.

### Claim 3 (depends on 1)

The method of claim 1, wherein the photosensitive layer is a dry film photoresist (DFR).

### Claim 4 (depends on 1)

The method of claim 1, wherein the first conductive layer is formed of a transparent material.

### Claim 5 (depends on 4)

The method of claim 4, wherein the transparent material is one selected from the group of indium tin oxide (ITO), silver (Ag), nano-wire, graphene and a conductive polymer.

### Claim 6 (depends on 1)

The method of claim 1, wherein the second conductive layer is formed of a material having a lower resistance than the first conductive layer.

### Claim 7 (depends on 6)

The method of claim 6, wherein the material having the lower resistance is one selected from the group of molybdenum (Mo), silver (Ag), titanium (Ti), aluminum (Al), and copper (Cu).

### Claim 8 (depends on 1)

The method of claim 1, further comprising:
forming an insulation layer on the substrate including the sensing electrodes and the lines;
patterning the insulation layer, thereby exposing side portions of sensing electrodes arranged in one direction;
forming a third conductive layer on the insulation layer and the exposed sensing electrodes; and
patterning the third conductive layer, thereby forming a bridge that connects adjacent ones of the sensing electrodes in the one direction to each other.