# US 2014/0151085 A1 · Transparent electrode and method for manufacturing the same

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- Number: US 2014/0151085 A1
- Document ID: US20140151085A1
- Status: Published application
- Kind: A1
- Application number: 14/232,070
- Filed: 2013-05-17
- Published: 2014-06-05
- Earliest claimed: 2012-06-06
- Assignees: Panasonic Corporation
- Applicants: Panasonic Corporation
- Inventors: Takashi Ichiryu; Yoshihisa Yamashita; Seiichi Nakatani
- Web page: https://patentgrep.com/patent/US20140151085A1

## CPC

- G06F 3/041: Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- H01B 5/14: comprising conductive layers or films on insulating-supports
- H01B 13/003: {using irradiation}
- H01B 13/0036: {Details}
- H10F 71/138: {Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes}
- H10F 71/1385: {Etching transparent electrodes}
- H10F 77/244: {made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers}
- H10F 77/251: {comprising zinc oxide [ZnO]}
- G06F 2203/04103: Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
- Y02E 10/50: Photovoltaic [PV] energy
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)
- H01B: CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES (selection for magnetic properties H01F1/00; waveguides H01P {; printed circuits H05K})
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

## Abstract

There is provided a transparent electrode comprising a supporting substrate, a first transparent electrically-conductive film provided on the supporting substrate, a transparent insulating film provided on the first transparent electrically-conductive film, and a second transparent electrically-conductive film provided on the transparent insulating film. In the transparent electrode of the present invention, all of the first transparent electrically-conductive film, the second transparent electrically-conductive film and the transparent insulating film provided therebetween comprise a metal compound, and the first transparent electrically-conductive film and the second transparent electrically-conductive film have a crystalline structure, whereas the transparent insulating film has an amorphous structure.

## Claims

### Claim 1

A transparent electrode comprising:
a supporting substrate;
a first transparent electrically-conductive film provided on the supporting substrate;
a transparent insulating film provided on the first transparent electrically-conductive film; and
a second transparent electrically-conductive film provided on the transparent insulating film,
wherein all of the first transparent electrically-conductive film, the second transparent electrically-conductive film and the transparent insulating film provided therebetween comprise a metal compound, and
wherein the first transparent electrically-conductive film and the second transparent electrically-conductive film have a crystalline structure, whereas the transparent insulating film has an amorphous structure.

### Claim 2 (depends on 1)

The transparent electrode according to claim 1, wherein a metal element, which constitutes the metal compound, is the same among the first transparent electrically-conductive film, the second transparent electrically-conductive film, and the transparent insulating film.

### Claim 3 (depends on 1)

The transparent electrode according to claim 1, wherein the metal compound is a zinc compound.

### Claim 4 (depends on 2)

The transparent electrode according to claim 2, wherein the first transparent electrically-conductive film and the second transparent electrically-conductive film at least comprise a zinc oxide, whereas the transparent insulating film at least comprises a zinc hydroxide.

### Claim 5 (depends on 1)

The transparent electrode according to claim 1, wherein the crystalline structure of the first transparent electrically-conductive film and the second transparent electrically-conductive film is in a form of needle.

### Claim 6 (depends on 5)

The transparent electrode according to claim 5, wherein the crystalline structure in the form of needle is oriented in the direction perpendicular to the supporting substrate.

### Claim 7 (depends on 5)

The transparent electrode according to claim 5, wherein the first transparent electrically-conductive film and the second transparent electrically-conductive film at least comprise a zinc oxide, whereas the transparent insulating film at least comprises a zinc hydroxide, and
wherein the zinc hydroxide of the transparent insulating film is in a form of sphere.

### Claim 8 (depends on 1)

The transparent electrode according to claim 1, wherein each thickness of the first transparent electrically-conductive film and the second transparent electrically-conductive film is 2 μm or less.

### Claim 9 (depends on 1)

The transparent electrode according to claim 1, wherein at least one of the first transparent electrically-conductive film, the second transparent electrically-conductive film, and the transparent insulating film includes a Group IIIB element.

### Claim 10 (depends on 9)

The transparent electrode according to claim 9, wherein the first transparent electrically-conductive film and the second transparent electrically-conductive film include the Group IIIB element.

### Claim 11 (depends on 10)

The transparent electrode according to claim 10, wherein the Group IIIB element of the first transparent electrically-conductive film and the Group IIIB element of the second transparent electrically-conductive film are different in their kinds from each other.

### Claim 12 (depends on 1)

The transparent electrode according to claim 1, wherein the first transparent electrically-conductive film and the second transparent electrically-conductive film have a patterned form.

### Claim 13 (depends on 1)

The transparent electrode according to claim 1, further comprising a gas barrier film between the supporting substrate and the first transparent electrically-conductive film.

### Claim 14 (depends on 1)

The transparent electrode according to claim 1, wherein at least one additional transparent insulating film and at least one additional transparent electrically-conductive film are alternately provided on the second transparent electrically-conductive film, and thereby there is provided a laminate structure in which a plurality of transparent electrically-conductive films and a plurality of transparent insulating films are alternately disposed on the supporting substrate.

### Claim 15 (depends on 1)

The transparent electrode according to claim 1, wherein the transparent electrode is used for a touch panel.

### Claim 16

A method for manufacturing a transparent electrode, comprising sequentially applying a first transparent electrically-conductive film raw material, a transparent insulating film raw material, and a second transparent electrically-conductive film raw material with respect to a supporting substrate heated at a predetermined temperature to form a lamination of a first transparent electrically-conductive film, a transparent insulating film, and a second transparent electrically-conductive film on the supporting substrate, the method comprising the steps of:
(i) applying the first transparent electrically-conductive film raw material onto the supporting substrate, and thereby forming the first transparent electrically-conductive film on the supporting substrate;
(ii) applying the transparent insulating film raw material onto the first transparent electrically-conductive film, and thereby forming the transparent insulating film on the first transparent electrically-conductive film; and
(iii) applying the second transparent electrically-conductive film raw material onto the transparent insulating film, and thereby forming the second transparent electrically-conductive film on the transparent insulating film,
wherein all of the first transparent electrically-conductive film raw material, the transparent insulating film raw material and the second transparent electrically-conductive film raw material comprise an organic metal compound and an organic solvent, and
wherein the first transparent electrically-conductive film and the second transparent electrically-conductive film, which are to be formed in the steps (i) and (iii), have a crystalline structure, whereas the transparent insulating film, which is to be formed in the step (ii), has an amorphous structure.

### Claim 17 (depends on 16)

The method according to claim 16, a metal element, which constitutes the organic metal compound, is the same among the first transparent electrically-conductive film raw material, the second transparent electrically-conductive film raw material, and the transparent insulating film raw material.

### Claim 18 (depends on 16)

The method according to claim 16, wherein an organic zinc compound is used as the organic metal compound.

### Claim 19 (depends on 16)

The method according to claim 16, wherein a heating temperature of the supporting substrate is changed between in the step (i) and in the step (ii), and between in the step (iii) and in the step (ii).

### Claim 20 (depends on 19)

The method according to claim 19, wherein the heating temperature of the supporting substrate in the steps (i) and (iii) is adjusted to 100° C. or higher, whereas the heating temperature of the supporting substrate in the step (ii) is adjusted to lower than 100° C.

### Claim 21 (depends on 20)

The method according to claim 20, wherein the heating temperature of the supporting substrate in the steps (i) to (iii) is 200° C. or lower.

### Claim 22 (depends on 16)

The method according to claim 16, wherein the applications of the first transparent electrically-conductive film raw material, the transparent insulating film raw material and the second transparent electrically-conductive film raw material are performed by a spray atomization.

### Claim 23 (depends on 22)

The method according to claim 22, wherein a spray nozzle is used in the spray atomization such that the spray nozzle is inclined with respect to the supporting substrate.

### Claim 24 (depends on 16)

The method according to claim 16, further comprising the step of irradiating the first transparent electrically-conductive film with ultraviolet ray, and/or the step of irradiating the second transparent electrically-conductive film with ultraviolet ray.

### Claim 25 (depends on 16)

The method according to claim 16, the method is performed to manufacture the transparent electrode used for a touch panel.