# US 2014/0150981 A1 · Peeling apparatus, peeling system and peeling method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0150981 A1 - Document ID: US20140150981A1 - Status: Published application - Kind: A1 - Application number: 14/083,790 - Filed: 2013-11-19 - Published: 2014-06-05 - Earliest claimed: 2012-12-04 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Masanori Itou; Masaru Honda; Takayuki Chinju - Web page: https://patentgrep.com/patent/US20140150981A1 ## CPC - B32B 43/006: {Delaminating} - B32B 38/1858: {using vacuum} - H10P 72/0428: {Apparatus for mechanical treatment or grinding or cutting} - H10P 72/0442: {Apparatus for placing on an insulating substrate, e.g. tape} - H10P 72/78: using vacuum or suction, e.g. Bernoulli chucks - B32B 2457/14: Semiconductor wafers - Y10T 156/1168: Gripping and pulling work apart during delaminating - Y10T 156/19: Delaminating means - B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract Provided is a peeling apparatus includes a first holding unit, a second holding unit, and a peeling inducing unit. The first holding unit holds a first substrate of a superimposed substrate in which the first substrate and a second substrate are bonded. The second holding unit holds the second substrate of the superimposed substrate and moves the second substrate in a direction of separating the second substrate from a surface of the first substrate. The peeling inducing unit forms an area where the second substrate starts to be peeled off from the first substrate on a side surface of the superimposed substrate. The second holding unit includes a first suction and moving unit and a second suction and moving unit. The first suction moving unit sucks and moves a circumferential edge portion of the second corresponding to the area formed by the peeling inducing unit, in a direction of separating the circumferential edge portion from the surface of the first substrate. The a second suction and moving unit sucks and moves a region which is closer to a central portion of the second substrate than to the circumferential edge portion of the second substrate, in a direction of separating the region from the surface of the first substrate. ## Claims ### Claim 1 A peeling apparatus comprising: a first holding unit configured to hold a first substrate of a superimposed substrate in which the first substrate and a second substrate are bonded; a second holding unit configured to hold the second substrate of the superimposed substrate and to move the second substrate in a direction of separating the second substrate from a surface of the first substrate; and a peeling inducing unit configured to form an area where the second substrate starts to be peeled off from the first substrate on a side surface of the superimposed substrate, wherein the second holding unit includes: a first suction moving unit configured to suck a circumferential edge portion of the second corresponding to the area formed by the peeling inducing unit and to move the circumferential edge portion in a direction of separating the circumferential edge portion from the surface of the first substrate, and a second suction and moving unit configured to suck a region which is closer to a central portion of the second substrate than to the circumferential edge portion of the second substrate and to move the region in a direction of separating the region from the surface of the first substrate. ### Claim 2 (depends on 1) The peeling apparatus of claim 1, wherein the first suction and moving unit has a suction area which is smaller than that of the second suction and moving unit. ### Claim 3 (depends on 1) The peeling apparatus of claim 1, wherein the second suction and moving unit moves the region which is closer to the central portion of the second substrate than to the circumferential edge, in the direction of separating the region from the surface of the first after the first suction and moving unit moves the circumferential edge of the second substrate in the direction of separating the circumferential edge from the surface of the first substrate. ### Claim 4 (depends on 1) The peeling apparatus of claim 1, wherein the second suction and moving unit sucks the central portion of the second substrate. ### Claim 5 (depends on 1) The peeling apparatus of claim 1, wherein the first suction and moving unit has a portion corresponding to an outer edge of the second substrate and formed in an arc shape along the outer edge of the second substrate. ### Claim 6 (depends on 1) The peeling apparatus of claim 1, wherein the peeling inducing unit includes a sharp member, and a moving mechanism configured to move the sharp member towards a side surface portion of the second substrate adjacent to a bonding portion of the first substrate and the second substrate in the side surface of the superimposed substrate. ### Claim 7 (depends on 6) The peeling apparatus of claim 6, wherein the moving mechanism moves the sharp member further forward after the sharp member comes into contact with the side surface portion of the second substrate adjacent to the bonding portion. ### Claim 8 (depends on 6) The peeling apparatus of claim 6, wherein the sharp member is formed of a hard metal. ### Claim 9 (depends on 6) The peeling apparatus of claim 6, further comprising: a measurement unit configured to measure a distance from a predetermined measurement reference position to a holding surface of the first holding unit or a distance from the measurement reference position to an object interposed between the measurement reference position and the holding surface; and a positioning unit configured to adjust a contact position of the sharp member in relation to the second substrate based on a measurement result of the measurement unit and information relating to a thickness of the superimposed substrate and acquired in advance. ### Claim 10 (depends on 1) The peeling apparatus of claim 1, further comprising: a rotation mechanism configured to rotate the first holding unit. ### Claim 11 A peeling system comprising: a carry-in/out station configured to dispose a superimposed substrate in which a first substrate and a second substrate are bonded; a substrate conveyance apparatus configured to convey the superimposed substrate disposed in the carry-in/out station; and a peeling station configured to separate the superimposed substrate conveyed by the substrate conveyance apparatus into the first substrate and the second substrate, wherein the peeling apparatus includes: a first holding unit configured to hold a first substrate of the superimposed substrate; a second holding unit configured to hold the second substrate of the superimposed substrate and to move the second substrate in a direction of separating the second substrate from a surface of the first substrate; and a peeling inducing unit configured to form an area where the second substrate starts to be peeled off from the first substrate on a side surface of the superimposed substrate, wherein the second holding unit includes: a first suction moving unit configured to suck a circumferential edge portion of the second corresponding to the area formed by the peeling inducing unit and to move the circumferential edge portion in a direction of separating the circumferential edge portion from the surface of the first substrate, and a second suction and moving unit configured to suck a region which is closer to a central portion of the second substrate than to the circumferential edge portion of the second substrate and to move the region in a direction of separating the region from the surface of the first substrate. ### Claim 12 A peeling method comprising: holding, by a first holding unit, a first substrate of a superimposed substrate in which the first substrate and a second substrate are bonded, the first holding unit being configured to hold the first substrate; forming, by a peeling inducing unit, an area where the second substrate starts to be peeled off from the first substrate on a side surface of the superimposed substrate, thereby inducing peeling, the peeling inducing unit being configured to form the area; sucking, by a first suction and moving unit, a circumferential edge portion of the second substrate corresponding to the area and moving the circumferential edge portion in a direction of separating the circumferential edge portion from a surface of the first substrate, the first suction and moving unit being configured to suck and move the circumferential edge portion in the direction of separating the circumferential edge portion from the surface of the first substrate; and sucking, by a second suction and moving unit, a region which is closer to a central portion of the second substrate than to the circumferential edge portion of the second substrate and moving the region in a direction of separating the region from the surface of the first substrate, the second suction and moving unit being configured to suck and move the region in the direction of separating the region from the surface of the first substrate.