# US 2014/0150974 A1 · Three-zone carrier head and flexible membrane > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0150974 A1 - Document ID: US20140150974A1 - Status: Published application - Kind: A1 - Application number: 14/078,019 - Filed: 2013-11-12 - Published: 2014-06-05 - Earliest claimed: 2012-11-30 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Jeonghoon Oh; Jamie Leighton - Web page: https://patentgrep.com/patent/US20140150974A1 ## CPC - B24B 37/27: Work carriers - B24B 37/30: for single side lapping of plane surfaces - H10P 52/00: Grinding, lapping or polishing of wafers, substrates or parts of devices - H10P 52/403: {of conductive or resistive materials} - H10P 72/0428: {Apparatus for mechanical treatment or grinding or cutting} - B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A flexible membrane for a carrier head of a chemical mechanical polisher includes a main portion, an annular outer portion, and three annular flaps. The main portion has a substrate mounting surface with a radius R. The annular outer portion extends upwardly from an outer edge of the main portion and has a lower edge connected to the main portion and an upper edge. The three annular flaps include a first annular flap joined to an inner surface of the main portion at a radial position between 75% and 95% of R, a second inwardly-extending annular flap joined to the annular outer portion at a position between the lower edge and the upper edge, and a third inwardly-extending annular flap joined to the upper edge of the annular outer portion. ## Claims ### Claim 1 A flexible membrane for a carrier head of a chemical mechanical polisher, comprising: a main portion with a lower surface to provide a substrate-mounting surface, the substrate mounting surface having a radius R; an annular outer portion extending upwardly from an outer edge of the main portion, the annular outer portion having a lower edge connected to the main portion and an upper edge; and exactly three annular flaps to divide a volume above the main portion into a plurality of chambers when the flexible membrane is secured to a carrier head, the three annular flaps including a first annular flap joined to an inner surface of the main portion at a radial position between 75% and 95% of R, a second annular flap joined to the annular outer portion at a position between the lower edge and the upper edge, the second annular flap extending inwardly from the outer annular portion, and a third annular flap joined to the upper edge of the annular outer portion, the third annular flap extending inwardly from the outer annular portion. ### Claim 2 (depends on 1) The flexible membrane of claim 1, wherein the substrate mounting surface has a diameter of about 150 mm. ### Claim 3 (depends on 2) The flexible membrane of claim 2, wherein the first annular flap is joined to the main portion about 10 mm from the outer edge of the main portion. ### Claim 4 (depends on 2) The flexible membrane of claim 2, wherein the first annular flap is joined to the main portion at a radial position between 85% and 90% of R. ### Claim 5 (depends on 1) The flexible membrane of claim 1, wherein the first annular flap includes a horizontally extending section and a vertically extending section connecting the laterally extending section to the main portion. ### Claim 6 (depends on 5) The flexible membrane of claim 5, comprising a notch at a junction between the horizontally extending section and the vertically extending section. ### Claim 7 (depends on 5) The flexible membrane of claim 5, wherein the horizontally extending section has a smaller thickness than the vertically extending section. ### Claim 8 (depends on 1) The flexible membrane of claim 1, wherein each of the flaps has a thickness smaller than a thickness of the main portion. ### Claim 9 (depends on 8) The flexible membrane of claim 8, wherein the annular outer portion comprises a body having a thickness greater than a thickness of the main portion. ### Claim 10 (depends on 1) The flexible membrane of claim 1, comprising a notch in an interior surface of the body of the annular outer portion at a junction of the body and the main portion. ### Claim 11 (depends on 10) The flexible membrane of claim 10, comprising an annular recess in an outer surface of the body between a lower edge and an upper edge of the body. ### Claim 12 (depends on 11) The flexible membrane of claim 11, wherein the outer surface of the body between the recess and the lower edge is a single vertical surface. ### Claim 13 (depends on 12) The flexible membrane of claim 12, wherein the outer surface of the body between the recess and the upper edge is a single vertical surface. ### Claim 14 (depends on 13) The flexible membrane of claim 13, wherein the outer surface of the body between the recess and the lower edge is laterally aligned with the outer surface of the body between the recess and the upper edge. ### Claim 15 A chemical mechanical polishing head, comprising: a base assembly; a retaining ring secured to the base assembly; and a flexible membrane secured to the base assembly, the flexible membrane including a main portion with a lower surface to provide a substrate-mounting surface, the substrate mounting surface having a radius R, an annular outer portion extending upwardly from an outer edge of the main portion, the annular outer portion having a lower edge connected to the main portion and an upper edge, and exactly three annular flaps to divide a volume above the main portion into a plurality of chambers when the flexible membrane is secured to a carrier head, the three annular flaps including a first annular flap joined to an inner surface of the main portion at a radial position between 75% and 95% of R, a second annular flap joined to the annular outer portion at a position between the lower edge and the upper edge, the second annular flap extending inwardly from the outer annular portion, and a third annular flap joined to the upper edge of the annular outer portion, the third annular flap extending inwardly from the outer annular portion. ### Claim 16 (depends on 1) The flexible membrane of claim 1, wherein lower edge of the annular outer portion is laterally aligned the upper edge of the annular outer portion, and comprising exactly one annular recess of substantially uniform depth in the outer surface of the body. ### Claim 17 (depends on 15) The polishing head of claim 15, comprising a first notch in an interior surface of the body of the annular outer portion at a junction of the body and the main portion. ### Claim 18 (depends on 17) The polishing head of claim 17, comprising a second notch in the interior surface of the body at a junction of the second annular flap and the annular outer portion. ### Claim 19 (depends on 18) The polishing head of claim 18, comprising an internal ring having a lower portion extending into the first notch and an upper portion extending into the second notch. ### Claim 20 (depends on 15) The polishing head of claim 15, wherein lower edge of the annular outer portion is laterally aligned the upper edge of the annular outer portion, and comprising exactly one annular recess of substantially uniform depth in the outer surface of the body.