# US 2014/0150824 A1 · Air-blown cleaning system for photomasks and method thereof

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- Number: US 2014/0150824 A1
- Document ID: US20140150824A1
- Status: Published application
- Kind: A1
- Application number: 13/762,541
- Filed: 2013-02-08
- Published: 2014-06-05
- Earliest claimed: 2012-12-03
- Assignees: Gudeng Precision Industrial Co., Ltd.
- Applicants: Gudeng Precision Industrial Co, Ltd.
- Inventors: YUNG-CHIN PAN; TSUNG-YI YANG; LIANG-WEI LAI
- Web page: https://patentgrep.com/patent/US20140150824A1

## CPC

- B08B 5/02: Cleaning by the force of jets, e.g. blowing-out cavities {(airguns or nozzles per se B05B1/005)}
- B08B 13/00: Accessories or details of general applicability for machines or apparatus for cleaning
- G03F 1/82: Auxiliary processes, e.g. cleaning or inspecting
- B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

An air-blown cleaning system for cleaning a photomask includes an image capturing module, an identification and control module, and an air knife device. The image capturing module captures an image of the photomask and divided the image into a plurality of sections for the identification and control module to identify particular sections with contaminants for subsequent cleaning and to store such data into a database. The air knife device includes at least one air knife module which receives data from the database and controls the air knife module to air blow the particular sections with contaminants. The instant disclosure also includes a method of air blow cleaning for cleaning a photomask.

## Claims

### Claim 1

An air-blown cleaning system for cleaning a photomask, comprising:
an image capturing module for capturing an image of the photomask and dividing the image into a plurality of sections;
an identification and control module for identifying the sections with contaminants on the photomask and storing to a database; and
an air knife device including at least one air knife module, receiving data from the database, and controlled the air knife module to air blow the sections with contaminants on the photomask according to the database.

### Claim 2 (depends on 1)

The system as recited in claim 1, wherein the image capturing module includes a microphotography unit for capturing a plurality of micro-images of the plurality of sections on the photomask.

### Claim 3 (depends on 2)

The system as recited in claim 2, wherein the system further comprises:
an image integration module for integrating the plurality of micro-images taken from the plurality of sections into an integrated photomask image.

### Claim 4 (depends on 3)

The system as recited in claim 3, wherein the identification and control module includes a display unit for displaying the integrated photomask image for operators to examine

### Claim 5 (depends on 4)

The system as recited in claim 4, wherein the identification and control module further includes a control unit for marking sections with contaminants.

### Claim 6 (depends on 1)

The system as recited in claim 1, wherein the identification and control module further includes a visual identification unit for identifying sections on the photomask with contaminants outside a predetermined set of tolerable dimensions of the photomask, recording a plurality of coordinates of contaminants, and outputting the coordinates and the corresponding sections with contaminants to database.

### Claim 7 (depends on 1)

The system as recited in claim 1, wherein the system further comprises: a mobilizing device for mobilizing the photomask proximate to the image capturing module and the air knife device.

### Claim 8

An air-blown cleaning method for cleaning a photomask, comprising steps of:
capturing an image of a photomask;
dividing the image of the photomask into a plurality of sections;
examining each section for contaminants;
recording the sections with contaminants for storing to a database; and
mobilizing an air knife device according to the database for air blown the sections with contaminants.

### Claim 9 (depends on 8)

The method as recited in claim 8, wherein the step of capturing an image of the photomask includes capturing a plurality of micro-images of the sections on the photomask via microphotography.

### Claim 10 (depends on 9)

The method as recited in claim 9 further comprising the step of:
integrating the plurality of micro-images of the sections on the photomask into an integrated photomask image.

### Claim 11 (depends on 10)

The method as recited in claim 10 further comprising the step of:
providing a display unit for displaying and identifying the integrated photomask image to an operator for examination.

### Claim 12 (depends on 8)

The method as recited in claim 8, wherein the step examining each section with contaminants includes a predetermined set of tolerable dimensions for contaminants on the photomask.

### Claim 13 (depends on 12)

The method as recited in claim 12 further comprising the step of:
providing a visual identification unit for identifying sections of the photomask with contaminants outside of the predetermined set of tolerable dimensions of the photomask, recording a plurality of coordinates with contaminants, and outputting the coordinates and the corresponding sections to the database.

### Claim 14 (depends on 8)

The method as recited in claim 8 further comprising the step of:
mobilizing the photomask proximate to the image capturing module and the air knife device.