# US 2014/0150819 A1 · Method of wet cleaning aluminum chamber parts

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- Number: US 2014/0150819 A1
- Document ID: US20140150819A1
- Status: Published application
- Kind: A1
- Application number: 14/041,385
- Filed: 2013-09-30
- Published: 2014-06-05
- Earliest claimed: 2012-12-05
- Assignees: Lam Research Corporation
- Applicants: Lam Research Corporation
- Inventors: Hong Shih; Fan-Cheung Sze; Brian McMillin; John Daugherty; Yan Fang; Duane Outka; Tuochuan Huang; Sivakami Ramanathan
- Web page: https://patentgrep.com/patent/US20140150819A1

## CPC

- B08B 7/04: by a combination of operations
- B08B 7/0021: {by liquid gases or supercritical fluids}
- B24C 1/003: {using material which dissolves or changes phase after the treatment, e.g. ice, CO2}
- H10P 72/0414: {using mainly spraying means, e.g. nozzles}
- B08B 7/028: {Using ultrasounds}
- B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B24C: ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces. The method includes CO2 dry ice blasting the surfaces of the aluminum part at approximately 35 to approximately 45 psi, masking the aluminum part to conceal the bare aluminum surfaces, soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C., scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water, and repeating the soaking and scrubbing in the recited order at least three additional times.

## Claims

### Claim 1

A method of wet cleaning an aluminum part comprising bare aluminum surfaces and anodized aluminum surfaces, the method comprising:
CO2 dry ice blasting at approximately 35 to approximately 45 psi the surfaces of the aluminum part;
masking the aluminum part to conceal the bare aluminum surfaces;
soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C.;
scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water; and
repeating the soaking and scrubbing in the recited order at least three additional times.

### Claim 2 (depends on 1)

The method of claim 1, wherein the CO2 dry ice blasting is continued for approximately 5 to approximately 10 minutes.

### Claim 3 (depends on 1)

The method of claim 1, wherein subsequent to the CO2 dry ice blasting the method further comprises flushing the surface of the aluminum part to be cleaned with deionized water at approximately 30 to approximately 40 psi and subsequently drying the aluminum part.

### Claim 4 (depends on 3)

The method of claim 3, wherein subsequent to the deionized water flush the method further comprises wiping all surfaces of the aluminum part with isopropyl alcohol, acetone, or isopropyl alcohol and acetone; and
rinsing the aluminum part with deionized water and subsequently removing excess deionized water with compressed dry air.

### Claim 5 (depends on 1)

The method of claim 1, wherein subsequent to the CO2 dry ice blasting the method further comprises soaking the aluminum part in approximately 30 wt % H2O2 solution for approximately 30 minutes followed by a rinse with deionized water.

### Claim 6 (depends on 5)

The method of claim 5, wherein the soaking in approximately 30 wt % H2O2 solution precedes the soaking in deionized water at or above approximately 60° C.

### Claim 7 (depends on 1)

The method of claim 1, wherein subsequent to the CO2 dry ice blasting the method further comprises scrubbing anodized aluminum surfaces of the aluminum part for approximately 6 minutes with a #360 diamond pad and deionized water followed by a deionized rinse and blowing off of excess deionized water.

### Claim 8 (depends on 7)

The method of claim 7, wherein the scrubbing of the anodized aluminum surfaces of the aluminum part precedes the soaking in deionized water at or above approximately 60° C.

### Claim 9 (depends on 7)

The method of claim 7, wherein subsequent to the scrubbing of the anodized aluminum surfaces of the aluminum part the method further comprises:
soaking the aluminum part in a solution comprising NH4OH, H2O2, and H2O for approximately 15 minutes followed by a deionized water rinse; and
scrubbing anodized aluminum surfaces of the aluminum part for approximately 8 additional minutes with a #360 diamond pad and deionized water.

### Claim 10 (depends on 9)

The method of claim 9, wherein the method further comprises scrubbing edges and corners of the aluminum part with a non-woven fiber scouring pad and deionized water followed by a deionized rinse.

### Claim 11 (depends on 1)

The method of claim 1, wherein the aluminum part is soaked in deionized water at or above approximately 65° C.

### Claim 12 (depends on 11)

The method of claim 11, wherein the aluminum part is soaked in deionized water at or above approximately 65° C. for approximately 45 minutes during each soaking.

### Claim 13 (depends on 1)

The method of claim 1, wherein subsequent to the at least 3 repetitions of the soaking and the scrubbing of the aluminum part with an abrasive pad, the method further comprises:
flushing anodized aluminum surfaces of the aluminum part for approximately 10 to approximately 20 minutes using deionized water at or above approximately 96° C.; and
scrubbing anodized aluminum surfaces of the aluminum part using #360 diamond pad and deionized water followed by rinsing with deionized water and drying of the aluminum part.

### Claim 14 (depends on 1)

The method of claim 1, wherein subsequent to the at least 3 repetitions of the soaking and the scrubbing of the aluminum part with an abrasive pad, the method further comprises:
wiping the aluminum part with an approximately 2 wt % HNO3 solution for approximately 2 minutes; and
rinsing the aluminum part with deionized water for approximately 2 minutes followed by blowing off excess deionized water.

### Claim 15 (depends on 1)

The method of claim 1, wherein subsequent to the at least 3 repetitions of the soaking and the scrubbing the aluminum part with an abrasive pad, the method further comprises wiping the aluminum part with a dilute sulfuric peroxide comprising approximately 5 vol % of 98 wt % H2SO4, approximately 5 vol % of 30 wt % H2O2, and approximately 90 vol % deionized water for approximately 2 minutes followed by rinsing with deionized water for approximately 2 minutes and blowing off of excess water.

### Claim 16 (depends on 1)

The method of claim 1, wherein subsequent to the dilute sulfuric peroxide wipe and deionized water rinse, the method further comprises removing the masking from the bare aluminum surfaces.

### Claim 17 (depends on 1)

The method of claim 1, wherein the method further comprises removing the masking from the bare aluminum surfaces and wiping the surfaces of the unmasked aluminum part with isopropyl alcohol and wiping the surfaces of the unmasked aluminum part with acetone.

### Claim 18 (depends on 1)

The method of claim 1, wherein the method further comprises removing the masking from the bare aluminum surfaces and scrubbing the wiped bare aluminum surfaces with a #3000 grit non-woven fiber scouring pad and deionized water and rinsing the surfaces of the aluminum part with deionized water for approximately 2 minutes followed by blowing off excess deionized water.

### Claim 19 (depends on 1)

The method of claim 1, wherein the method further comprises removing the masking from the bare aluminum surfaces and rinsing the surfaces of the unmasked aluminum part with ultrapure water for approximately 2 minutes followed by ultrasonic cleaning for approximately 20 minutes at a power density of approximately 8 to approximately 15 W/in2.

### Claim 20

A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces, the method comprising:
CO2 dry ice blasting at approximately 35 to approximately 45 psi for approximately 5 to approximately 10 minutes the surfaces of the aluminum part;
flushing the dry ice blasted surfaces of the aluminum part to be cleaned with deionized water at approximately 30 to approximately 40 psi and subsequently drying the aluminum part;
wiping the flushed surfaces of the aluminum part with isopropyl alcohol;
wiping the flushed surfaces of the aluminum part with acetone;
rinsing the wiped aluminum part with deionized water and subsequently removing excess deionized water with compressed dry air;
masking the aluminum part to conceal the bare aluminum surfaces;
soaking the masked aluminum part in approximately 30 wt % H2O2 solution for approximately 30 minutes followed by a rinse with deionized water;
scrubbing the anodized aluminum surfaces of the masked aluminum part for approximately 6 minutes with a #360 diamond pad and deionized water followed by a deionized rinse and blowing off of excess deionized water;
soaking the masked aluminum part in a solution comprising NH4OH, H2O2, and H2O for approximately 15 minutes followed by a deionized water rinse;
scrubbing the anodized aluminum surfaces of the masked aluminum part for approximately 8 minutes with a #360 diamond pad and deionized water;
scrubbing edges and corners of the masked aluminum part with a non-woven fiber scouring pad and deionized water followed by a deionized rinse;
performing at least one additional repetition of scrubbing anodized aluminum surfaces of the masked aluminum part for approximately 8 minutes with a #360 diamond pad and deionized water and scrubbing the edges and corners of the aluminum part with a non-woven fiber scouring pad and deionized water followed by a deionized water rinse;
subsequently performing at least two repetitions of soaking the aluminum part in deionized water at or above approximately 65° C. for approximately 45 minutes followed by scrubbing anodized aluminum surfaces of the aluminum part with #360 diamond pad and deionized water;
subsequently performing at least two repetitions of soaking the aluminum part in deionized water at or above approximately 65° C. for approximately 45 minutes followed by scrubbing anodized aluminum surfaces of the aluminum part with a non-woven fiber scouring pad and deionized water;
rinsing the aluminum part with deionized water;
flushing the anodized aluminum surfaces of the rinsed aluminum part for approximately 10 to approximately 20 minutes using deionized water at or above 96° C.;
scrubbing the anodized aluminum surfaces of the flushed aluminum part using #360 diamond pad and deionized water followed by rinsing with deionized water and drying of the aluminum part;
wiping the scrubbed aluminum part with a 2 wt % HNO3 solution for approximately 2 minutes and rinsing the aluminum part with deionized water for approximately 2 minutes followed by blowing off excess deionized water;
wiping the aluminum part with a dilute sulfuric peroxide comprising approximately 5 vol % of approximately 98 wt % H2SO4, approximately 5 vol % of approximately 30 wt % H2O2, and approximately 90 vol % deionized water for approximately 2 minutes followed by rinsing with deionized water for approximately 2 minutes and blowing off of excess water;
removing the masking from the bare aluminum surfaces;
wiping the surfaces of the unmasked aluminum part with isopropyl alcohol;
wiping the surfaces of the unmasked aluminum part with acetone;
scrubbing the bare aluminum surfaces with a #3000 grit non-woven fiber scouring pad and deionized water;
rinsing the surfaces of the aluminum part with deionized water for approximately 2 minutes followed by blowing off excess deionized water;
rinsing the surfaces of the unmasked aluminum part with ultrapure water for approximately 2 minutes followed by ultrasonic cleaning for approximately 20 minutes at a power density of approximately 8 to approximately 15 W/in2; and
rinsing the aluminum part with deionized water for approximately 2 minutes followed by drying of the aluminum part.