# US 2014/0150815 A1 · Disc-brush holder apparatus, disc-brush assembly, and substrate processing methods > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0150815 A1 - Document ID: US20140150815A1 - Status: Published application - Kind: A1 - Application number: 13/691,542 - Filed: 2012-11-30 - Published: 2014-06-05 - Earliest claimed: 2012-11-30 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Hui Chen - Web page: https://patentgrep.com/patent/US20140150815A1 ## CPC - A46B 13/008: {Disc-shaped brush bodies} - A46B 17/02: Devices for holding brushes in use - B08B 1/36: rotating about an axis orthogonal to the surface - A46B 13/02: power-driven {carriers} - A46B 2200/30: Brushes for cleaning or polishing - A46B 2200/3093: Brush with abrasive properties, e.g. wire bristles - A46B: BRUSHES (handles not integral with brushware B25G) - B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL ## Abstract In one aspect, a disc-brush pad holder apparatus is disclosed. The disc-brush pad holder apparatus has a first portion adapted to couple to a rotatable adapter, and a pad holding portion having a frontal surface receiving a disc-brush pad, the pad holding portion having a flexible radially-extending disc portion that flexes during cleaning. Disc-brush assemblies and methods of processing substrates are provided, as are numerous other aspects. ## Claims ### Claim 1 A disc-brush holder apparatus, comprising: a first portion adapted to couple to a rotatable adapter, and a pad holding portion coupled to the first portion and having a frontal surface adapted to receive a disc-brush pad, the pad holding portion having a radially-extending disc portion having a spring rate of less than about 30 lb/in when measured by applying a force of 3 lb at an radially-outermost periphery of the radially-extending disc portion. ### Claim 2 (depends on 1) The disc-brush holder apparatus of claim 1, comprising: two or more flexible wings. ### Claim 3 (depends on 1) The disc-brush holder apparatus of claim 1, comprising: a plurality of slots extending from the radially-outermost periphery of the radially-extending disc portion. ### Claim 4 (depends on 1) The disc-brush holder apparatus of claim 1, wherein first portion comprises a shaft and the radially-extending disc portion extends outwardly from the shaft. ### Claim 5 (depends on 1) The disc-brush holder apparatus of claim 1, comprising a plurality of slots extending from the radially-outermost periphery toward a center of the pad holding portion forming a plurality of flexible wings. ### Claim 6 (depends on 5) The disc-brush scrubber apparatus of claim 5, wherein the plurality of slots comprise a first open end adjacent to the radially-outermost periphery and a second closed end radially inward from the first open end. ### Claim 7 (depends on 6) The disc-brush holder apparatus of claim 6, wherein each of the plurality of slots comprises an enlarged portion having a dimension larger at the second closed end that is larger than a width of the slot. ### Claim 8 (depends on 1) The disc-brush scrubber apparatus of claim 1, wherein the radially-extending disc portion comprises two or more flexible wings that are unsupported along a portion of a radial extent thereof. ### Claim 9 (depends on 1) The disc-brush scrubber apparatus of claim 1, wherein the radially-extending disc portion has an axial thickness of between about 1.9 mm and 2.1 mm. ### Claim 10 (depends on 1) The disc-brush scrubber apparatus of claim 1, wherein the frontal surface of the radially-extending disc portion comprises a non-planar surface. ### Claim 11 (depends on 10) The disc-brush scrubber apparatus of claim 10, wherein the non-planar surface comprises a draft angle of between about 1.5 and about 2.0 degrees. ### Claim 12 A disc-brush assembly, comprising: a disc-brush holder adapted to receive a disc brush pad, the disc-brush holder including a first portion, and a pad holding portion coupled to the first portion and having a frontal surface adapted to receive a disc-brush pad, the pad holding portion having a radially-extending disc portion having a spring rate of less than about 30 lb/in when measured by applying a force of 3 lb at an radially-outermost periphery of the radially-extending disc portion; an adapter adapted to couple to the first portion of the disc-brush holder and rotate the disc-brush holder; and a substrate holder adapted to position a substrate adjacent to the disc-brush holder. ### Claim 13 (depends on 12) The disc-brush scrubber assembly of claim 12, wherein the radially-extending disc portion comprises two or more flexible wings that are unsupported along a portion of a radial extent thereof. ### Claim 14 (depends on 12) The disc-brush scrubber assembly of claim 12, wherein radially-extending disc portion has an axial thickness of between about 1.9 mm and about 2.1 mm. ### Claim 15 (depends on 12) The disc-brush scrubber assembly of claim 12, wherein the frontal surface of the radially-extending disc portion adapted to receive a disc-brush pad comprises a non-planar surface. ### Claim 16 (depends on 12) The disc-brush scrubber assembly of claim 12, comprising axially spring biasing the first portion relative to the adapter. ### Claim 17 (depends on 12) The disc-brush scrubber assembly of claim 12, comprising a restrainer axially slidable relative to the adapter. ### Claim 18 A method of processing a substrate, comprising: providing a substrate in a substrate holder; providing a disc-brush holder including a pad holding portion receiving a disc-brush pad, the pad holding portion having a radially-extending disc portion; and flexing the radially-extending disc portion while rotating the disc-brush holder in contact with the substrate. ### Claim 19 (depends on 18) The method of claim 18, comprising moving the disc-brush pad holder axially relative to an adapter by applying an axial contact force onto the disc-brush pad with the substrate in the substrate holder. ### Claim 20 (depends on 18) The method of claim 18, wherein the flexing comprising elastically deforming the radially-extending disc portion such that a portion flexed is substantially even axially with a center portion of the radially-extending disc portion.