# US 2014/0150571 A1 · Pressure sensor, method for manufacture thereof, and pressure detection module > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0150571 A1 - Document ID: US20140150571A1 - Status: Published application - Kind: A1 - Application number: 14/123,126 - Filed: 2012-04-20 - Published: 2014-06-05 - Earliest claimed: 2011-05-30 - Assignees: Nippon Mektron, Ltd.; National Institute of Advanced Industrial Science and Technology; The University of Tokyo - Inventors: Yasuo Kuniyoshi; Yoshiyuki Ohmura; Takashi Sagisaka; Akihiko Nagakubo; Kazuyuki Ozaki; Taisuke Kimura; Takashige Ohsawa; Masatoshi Nakajima; Masayuki Noguchi; Katsuyoshi Iizuka - Web page: https://patentgrep.com/patent/US20140150571A1 ## CPC - G01L 1/205: {using distributed sensing elements} - G01L 1/20: by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids (of piezo-resistive materials G01L1/18); by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress - G01L 5/228: {using tactile array force sensors} - A61B 5/1036: {Measuring load distribution, e.g. podologic studies} - A61B 5/6806: {Gloves} - A61B 2562/0247: Pressure sensors - G06F 3/0416: {Control or interface arrangements specially adapted for digitisers} - G06F 3/044: by capacitive means - G06F 3/045: using resistive elements, e.g. a single continuous surface or two parallel surfaces put in contact - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) - A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D) - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) ## Abstract A pressure sensor comprising: a base film on which a conductor pattern having one or more electrodes is formed; a cover film laminated on the base film so as to cover the electrodes of the conductor pattern; and a spacer disposed between the cover film and the base film so as to form a hollow portion having a predetermined gap between the electrode and the cover film; wherein a portion corresponding to the hollow portion of the cover film is constructed such that it has a pressure sensing part which is able to deform in a direction to move toward and away from the electrode in accordance with pressure, and of which contact resistance changes in accordance with a contact pressure thereof with the electrode, so that the pressure sensing part detects the pressure by a change of the contact resistance. ## Claims ### Claim 1 A pressure sensor comprising: a base film on which a conductor pattern having one or more electrodes is formed; a cover film laminated on the base film so as to cover the electrodes of said conductor pattern; and a spacer disposed between said cover film and said base film so as to form a hollow portion having a predetermined gap between said electrode and said cover film; wherein a portion corresponding to said hollow portion of said cover film is constructed such that it has a pressure sensing part which is able to deform in a direction to move toward and away from said electrode in accordance with pressure, and of which contact resistance changes in accordance with a contact pressure thereof with said electrode, so that the pressure sensing part detects the pressure by a change of the contact resistance, wherein said hollow portion is opened to outside air. ### Claim 2 (depends on 1) The pressure sensor as set forth in claim 1, wherein a bank being non-bonded to said cover film is formed between said electrodes and said spacer. ### Claim 3 (depends on 1) The pressure sensor as set forth in claim 1, wherein said electrodes are a pair of electrodes which are disposed side by side on said base film. ### Claim 4 (depends on 1) The pressure sensor as set forth in claim 1, wherein one of said electrodes is disposed on said base film, and another electrode is disposed on said cover film which is electrically connected to said pressure sensing part. ### Claim 5 (depends on 1) The pressure sensor as set forth in claim 1, wherein said base film has a strip-shaped structure, and said hollow portion is opened to one side edge of said base film. ### Claim 6 (depends on 1) The pressure sensor as set forth in claim 1, wherein metal plating for prevention of oxidation is applied to a portion of said conductor pattern exposed to said hollow portion including said electrodes. ### Claim 7 (depends on 1) The pressure sensor as set forth in claim 1, wherein said cover film is formed with a cut for reducing tensile force at the time of bending. ### Claim 8 (depends on 1) The pressure sensor as set forth in claim 1, wherein said pressure sensing part is a pressure sensing thin film deposited on said cover film. ### Claim 9 (depends on 1) The pressure sensor as set forth in claim 1, wherein said spacer or/and bank are composed of a photosensitive cover. ### Claim 10 (depends on 1) The pressure sensor as set forth in claim 1, wherein protrusions are formed on said cover film. ### Claim 11 A method for manufacture of a pressure sensor, comprising: forming a conductor pattern provided with a pair of electrodes on a base film; laminating a photosensitive cover on said base film, and removing at least a portion of said conductor pattern corresponding to said pair of electrodes thereby to cause said portion to be exposed, while covering a remaining portion of said conductor pattern with a remaining portion of said photosensitive cover; applying metal plating treatment for prevention of oxidation to the exposed portion of said conductor pattern including said pair of electrodes; and forming, thereafter, a hollow portion opened to outside air in the removed portion of said photosensitive cover corresponding to said pair of electrodes, by laminating a cover film with a pressure sensing part formed thereon in advance in which contact resistance thereof changes according to a pressure of contact thereof with said electrodes, and by bonding said cover film to the remaining portion of said photosensitive cover by means of an adhesive agent. ### Claim 12 A method for manufacture of a pressure sensor, comprising: forming a conductor pattern provided with one electrode on a base film; laminating a photosensitive cover on said base film, and removing at least a portion of said conductor pattern corresponding to said electrode thereby to cause said portion to be exposed, while covering a remaining portion of said conductor pattern with a remaining portion of said photosensitive cover; applying metal plating treatment for prevention of oxidation to the exposed portion of said conductor pattern including said electrode; and forming, thereafter, a hollow portion opened to outside air in the removed portion of said photosensitive cover corresponding to said electrode, by laminating a cover film with a pressure sensing part, in which contact resistance thereof changes according to a pressure of contact thereof with said electrode, and another electrode electrically connected to said pressure sensing part formed thereon in advance, and by bonding said cover film to the remaining portion of said photosensitive cover by means of an adhesive agent. ### Claim 13 (depends on 11) The method for manufacture of a pressure sensor as set forth in claim 11, wherein at the time of removing that portion of said photosensitive cover which corresponds to said electrode on said base film, said photosensitive cover is used to shape a spacer and a bank, and said cover film is bonded to said spacer, but non-bonded to said bank. ### Claim 14 (depends on 1) A pressure detection module comprising: a flexible circuit board having one or more strip-shaped portions; and a pressure sensor as set forth in claim 1, being disposed on said one or more strip-shaped portions which constitute said flexible circuit board. ### Claim 15 (depends on 14) The pressure sensing module as set forth in claim 14, wherein said strip-shaped portions are composed of a tree structure in which said strip-shaped portions branch in a hierarchical manner, and said pressure sensor is arranged in an end portion of each of said strip-shaped portions. ### Claim 16 (depends on 14) The pressure sensing module as set forth in claim 14, wherein one or more communication terminals formed on said flexible circuit board; and one or more electronic circuit parts formed on said flexible circuit board and electrically connected to said pressure sensor and said communication terminals through wiring extending from said flexible circuit board, said electronic circuit parts each having a communication function to obtain information obtained by each of said pressure sensors and to transmit the information to said communication terminals.