# US 2014/0150552 A1 · Chip Level Sensor with Multiple Degrees of Freedom

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- Number: US 2014/0150552 A1
- Document ID: US20140150552A1
- Status: Published application
- Kind: A1
- Application number: 13/690,932
- Filed: 2012-11-30
- Published: 2014-06-05
- Earliest claimed: 2012-11-30
- Assignees: Robert Bosch GmbH
- Inventors: Ando Feyh; Po-Jui Chen
- Web page: https://patentgrep.com/patent/US20140150552A1

## CPC

- G01C 19/5712: the devices involving a micromechanical structure
- B81B 7/02: containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence)
- G01C 19/5755: the devices having a single sensing mass
- G01C 19/5769: Manufacturing; Mounting; Housings
- G01C 25/00: Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass (testing, calibrating or compensating compasses G01C17/38)
- G01P 15/123: {by piezo-resistive elements, e.g. semiconductor strain gauges}
- G01P 15/125: by capacitive pick-up
- G01P 15/18: in two or more dimensions
- B81B 2201/0235: Accelerometers
- B81B 2201/0242: Gyroscopes
- B81B 2207/053: of movable structures
- G01P 2015/0808: {for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate}
- G01P 2015/0814: {for translational movement of the mass, e.g. shuttle type}
- G01P 2015/0848: {using a plurality of mechanically coupled spring-mass systems, the sensitive direction of each system being different}
- G01P 2015/0882: {for providing damping of vibrations}
- Y10T 29/42: Piezoelectric device making
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G})
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A sensing assembly device includes a substrate, a chamber above the substrate, a first piezoelectric gyroscope sensor positioned within the chamber, and a first accelerometer positioned within the chamber.

## Claims

### Claim 1

A sensing assembly device comprising:
a substrate;
a chamber above the substrate;
a first piezoelectric gyroscope sensor positioned within the chamber; and
a first accelerometer positioned within the chamber.

### Claim 2 (depends on 1)

The device of claim 1, further comprising:
a second piezoelectric gyroscope sensor positioned within the chamber; and
a second accelerometer positioned within the chamber.

### Claim 3 (depends on 2)

The device of claim 2, further comprising:
a third piezoelectric gyroscope sensor positioned within the chamber; and
a third accelerometer positioned within the chamber, wherein:
the first piezoelectric gyroscope sensor is configured to sense rotation about a first axis;
the second piezoelectric gyroscope sensor is configured to sense rotation about a second axis;
the third piezoelectric gyroscope sensor is configured to sense rotation about a third axis; and
each of the first, second and third axis is orthogonal to each of the other of the first, second and third axis.

### Claim 4 (depends on 2)

The device of claim 2, wherein the first accelerometer is a piezoelectric accelerometer.

### Claim 5 (depends on 4)

The device of claim 4, the first accelerometer comprising:
a body portion; and
a plurality of first plates extending from the body portion and interdigitated with a plurality of second plates which are fixed with respect to the plurality of first plates.

### Claim 6 (depends on 5)

The device of claim 5, further comprising:
a control system operably connected to the plurality of first plates and the plurality of second plates and configured to adjust the stiffness of the first accelerometer.

### Claim 7 (depends on 2)

The device of claim 2, wherein the first accelerometer is a capacitive accelerometer.

### Claim 8 (depends on 7)

The device of claim 7, wherein the second accelerometer is a capacitive accelerometer.

### Claim 9 (depends on 1)

The device of claim 1, further comprising a cap, wherein:
an inside surface of the cap defines a portion of the chamber;
the first accelerometer is attached to the substrate; and
the first piezoelectric gyroscope is attached to the inside surface of the cap.

### Claim 10 (depends on 1)

The device of claim 1, further comprising a cap, wherein:
an inside surface of the cap defines a portion of the chamber;
the first accelerometer is attached to the inside surface of the cap; and
the first piezoelectric gyroscope is attached to the substrate.

### Claim 11 (depends on 1)

The device of claim 1, wherein:
the first accelerometer is attached to the substrate; and
the first piezoelectric gyroscope is attached to the substrate.

### Claim 12 (depends on 1)

The device of claim 1, wherein the first accelerometer is a multiple-axis sensor.

### Claim 13 (depends on 1)

The device of claim 1, wherein the first piezoelectric gyroscope sensor is a multiple-axis sensor.

### Claim 14

A method of forming a sensing assembly device comprising:
providing a substrate;
forming a first piezoelectric gyroscope sensor above the substrate;
forming a first accelerometer positioned above the substrate; and
forming a chamber above the substrate such that the first piezoelectric gyroscope sensor and the first accelerometer are within the chamber.

### Claim 15 (depends on 14)

The method of claim 14, further comprising;
establishing an environment within the chamber, the environment selected to provide damping to the first accelerometer.

### Claim 16 (depends on 15)

The method of claim 15, further comprising:
forming a plurality of first plates on a body portion of the first accelerometer; and
forming a plurality of second fixed plates interdigitated with the plurality of first plates, such that the plurality of second fixed plates are located within the chamber when the chamber is formed.

### Claim 17 (depends on 14)

The method of claim 14, further comprising:
forming a second piezoelectric gyroscope sensor above the substrate; and
forming a second accelerometer above the substrate, wherein forming a chamber above the substrate comprises forming the chamber such that the second piezoelectric gyroscope sensor and the second accelerometer are within the chamber.

### Claim 18 (depends on 17)

The method of claim 17, wherein:
the first piezoelectric gyroscope sensor is configured to sense rotation about a first axis;
the second piezoelectric gyroscope sensor is configured to sense rotation about a second axis; and
the first axis is orthogonal to the second axis.

### Claim 19 (depends on 14)

The method of claim 14, wherein:
forming a first piezoelectric gyroscope sensor comprises supporting the first piezoelectric gyroscope sensor with a cap defining a portion of the chamber; and
forming a first accelerometer comprises supporting the first accelerometer with the substrate.

### Claim 20 (depends on 14)

The method of claim 14, wherein:
forming a first piezoelectric gyroscope sensor comprises supporting the first piezoelectric gyroscope sensor with the substrate; and
forming a first accelerometer comprises supporting the first accelerometer with a cap defining a portion of the chamber.