Substrate and mask attachment clamp device
AssigneeIndustrial Technology Research Institute
InventorsChen-Chung Du, Muh-Wang Liang, Yuan-Yuan Chiang
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AssigneeIndustrial Technology Research Institute
InventorsChen-Chung Du, Muh-Wang Liang, Yuan-Yuan Chiang
Estimating the term…
A substrate and mask attachment clamp device comprising a push assembly, an upper clamp mechanism and a lower clamp mechanism is disclosed. The upper clamp mechanism comprises a first inclined surface, a swing element, a second inclined surface and a sliding surface. The lower clamp mechanism comprises a lower clamp retainer and a clamp movably. During the push assembly moving along a first direction, the push assembly moves with respect to the first inclined surface to drive the upper clamp mechanism to move along a second direction. The push assembly further drives the second inclined surface to move with respect to the swing element, so that the swing element drives the clamp to move along a third direction opposite to the first direction, and drives the sliding surface to move with respect to the lower clamp mechanism to drive the clamp to move along a fourth direction.
A substrate and mask attachment clamp device, comprising;
Dependencies are inferred from the claim text.