Apparatus and methods for plasma enhanced chemical vapor deposition of dielectric/polymer coatings

Abstract

Apparatuses and methods are described that involve the deposition of coatings on substrates. The polymer coatings generally comprise a wear resistant layer and/or a hydrophobic layer. The wear resistant layer can comprise a metal oxide or metal nitride. The hydrophobic layer can comprise fused polymer particles having an average primary particle diameter on the nanometer to micrometer scale. The coatings are deposited on substrates using specifically adapted plasma enhanced atomic layer deposition and plasma enhanced chemical vapor deposition approaches. The substrates can include computing devices and fabrics.

Dependencies are inferred from the claim text.