Vacuum pump
AssigneeEbara Corporation
InventorsSoichi Kudara, Yasuhiro Niimura, Masami Nagayama
Life of this patent
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Abstract
A vacuum pump (10) includes a pump casing (56) having an inlet port (54a), an outlet port (54b), and pump chambers (50a-50f) defined therein, rotational shafts 60 having opposite ends rotatably supported by bearings (84a, 84b) on the pump casing (56) and extending longitudinally in the pump casing (56), and rotors (62a-62f) housed in the pump chambers (50a-50f) and coupled to the rotational shafts (60) for rotation in unison with the rotational shafts (60). The pump casing (56) has an atmosphere-vented compartment (52) defined therein which is held in fluid communication with the outlet port (54b) of the pump casing (56) and vented to the atmosphere.
Claims4
A vacuum pump comprising:
- a pump casing having an inlet port, an outlet port, and a pump chamber defined therein;
- a rotational shaft having opposite ends rotatably supported by bearings and extending longitudinally in the pump casing;
- and
- a rotor housed in the pump chamber and coupled to the rotational shaft for rotation in unison with the rotational shaft;
- wherein the pump casing has an atmosphere-vented compartment defined therein which is held in fluid communication with the outlet port of the pump casing and vented to the atmosphere.
Dependencies are inferred from the claim text.