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US 2014/0112650 A1Published application
Cartridge heater apparatus
AssigneeEdwards Vacuum LLC
InventorsBudd E. Faulkner, Mark Kollin Romeo
Life of this patent
Estimating the term…
Abstract
A cartridge heater apparatus includes a tube; a heating cartridge adapted to be inserted into the tube for heating fluid passing through a passage space between the heating cartridge and the tube, the heating cartridge being secured at a first end thereof in a cantilever manner; and means for supporting the heating cartridge in the tube at a location distant from the first end, without blocking the fluid passing through the passage space between the heating cartridge and the tube.
Claims25
A cartridge heater apparatus comprising:
- a tube;
- a heating cartridge adapted to be inserted into the tube for heating fluid passing through a passage space between the heating cartridge and the tube, the heating cartridge being secured at a first end thereof in a cantilever manner;
- and
- means for supporting the heating cartridge in the tube at a location distant from the first end, without blocking the fluid passing through the passage space between the heating cartridge and the tube.
1 more element
A system comprising:
- a process chamber;
- a vacuum pump arrangement connected to an outlet of the process chamber for evacuating fluid from the process chamber;
- an abatement device connected to an outlet of the vacuum pump arrangement via a tube for treating exhaust fluid emitted from the vacuum pump arrangement;
- a heating cartridge adapted to be inserted into the tube for heating the exhaust fluid passing through a passage space between the heating cartridge and the tube, the heating cartridge being secured at a first end thereof in a cantilever manner;
- and
- means for supporting the heating cartridge in the tube at a location distant from the first end, without blocking the exhaust fluid passing through the passage space between the heating cartridge and the tube.
3 more elements
Dependencies are inferred from the claim text.