Integrated optoelectronic device and system with waveguide and manufacturing process thereof
AssigneeSTMicroelectronics S.r.l.
InventorsAlberto PAGANI, Alessando MOTTA, Sara LOI, Guido CHIARETTI
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AssigneeSTMicroelectronics S.r.l.
InventorsAlberto PAGANI, Alessando MOTTA, Sara LOI, Guido CHIARETTI
Estimating the term…
An integrated electronic device, delimited by a first surface and by a second surface and including: a body made of semiconductor material, formed inside which is at least one optoelectronic component chosen between a detector and an emitter; and an optical path which is at least in part of a guided type and extends between the first surface and the second surface, the optical path traversing the body. The optoelectronic component is optically coupled, through the optical path, to a first portion of free space and a second portion of free space, which are arranged, respectively, above and underneath the first and second surfaces.
An integrated optoelectronic device, delimited by a first surface and a second surface and comprising:
A process for manufacturing an optoelectronic device delimited by a first surface and by a second surface, comprising the steps of:
Dependencies are inferred from the claim text.