Robust modulator circuits using lateral doping junctions
AssigneeAcacia Communications, Inc.
InventorsDiedrik VERMEULEN, Long CHEN, Christopher DOERR
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Abstract
Disclosed herein are methods, structures, and devices that compensates for modulator loss and modulation inefficiencies introduced by mask misalignments in opposite oriented pn type junction modulators. More specifically, Mach-Zehnder type optical modulators are disclosed wherein both arms in the MZI modulator are arranged in a push-pull configuration and configured to experience pn type junctions of two orientations wherein both arms further configured to experience the same length of waveguide with a pn type junction of each orientation.
Claims20
A Mach-Zehnder type optical modulator comprising:
- an input optical waveguide;
- an output optical waveguide;
- a first optical waveguide arm and a second optical waveguide arm each optically connecting the input optical waveguide to the output optical waveguide;
- wherein the first optical waveguide arm and the second optical waveguide arm cross one another.
A Mach-Zehnder type optical modulator comprising:
- an input optical waveguide;
- an output optical waveguide;
- a first optical waveguide arm and a second optical waveguide arm each optically connecting in parallel the input optical waveguide to the output optical waveguide;
- a number of pn type junctions, each individual pn type junction exhibiting one of two possible orientations;
- wherein each individual one of the two optical waveguide arms has associated with it a number of the pn type junctions, said number of pn type junctions including pn type junctions of one orientation and pn type junctions of the other orientation;
- wherein both optical waveguide arms exhibit the same length of waveguide associated with a pn type junction of a certain orientation.
In a Mach-Zehnder type optical modulator comprising an input optical waveguide, an output optical waveguide, a first optical waveguide arm and a second optical waveguide arm each optically connecting the input optical waveguide to the output optical waveguide, a method of compensating for a difference in modulator loss and modulation efficiency introduced by mask misalignments in oppositely-oriented pn junctions, said method comprising:
- arranging the first optical waveguide arm and the second optical waveguide arm relative to the oppositely-oriented pn junctions such that they experience the same length of waveguide with a pn junction of a certain orientation.
Dependencies are inferred from the claim text.