X-ray emitting target and x-ray emitting device
AssigneeCanon Kabushiki Kaisha
InventorsTakao Ogura, Yasue Sato, Nobuhiro Ito
Life of this patent
Estimating the term…
Abstract
An X-ray emitting target including a diamond substrate, a first layer disposed on the diamond substrate and including a first metal, and a second layer disposed on the first layer and including a second metal whose atomic number is 42 or more and which has a thermal conductivity higher than that of the first metal. Carbide of the first metal is present at a boundary between the diamond substrate and the first layer. The target is prevented from overheating, so that output variation due to rising temperature is suppressed. Thus it is possible to emit stable and high output X-rays.
Claims9
An X-ray emitting target comprising:
- a diamond substrate;
- a first layer disposed on the diamond substrate and including a first metal;
- and
- a second layer disposed on the first layer and including a second metal whose atomic number is 42 or more and which has a thermal conductivity higher than that of the first metal,
- wherein a carbide of the first metal is present at a boundary between the diamond substrate and the first layer.
An X-ray emitting target comprising:
- a diamond substrate;
- a first layer disposed on the diamond substrate and including a first metal where a standard free energy of formation of carbide in a temperature range from 500 degrees Celsius to 1500 degrees Celsius is negative;
- and
- a second layer disposed on the first layer and including a second metal whose atomic number is 42 or more and which has a thermal conductivity higher than that of the first metal.
Dependencies are inferred from the claim text.