Loading patent…
AssigneeKLA-Tencor Corporation
InventorsAmnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Paykin Irina, Alexander Svizher, Meir Aloni, Guy Ben Dov, Hadar Shalmoni, Vladimir Levinski
Estimating the term…
Systems and methods are provided which derive target characteristics from interferometry images taken at multiple phase differences between target beams and reference beams yielding the interferometry images. The illumination of the target and the reference has a coherence length of less than 30 microns to enable scanning the phase through the coherence length of the illumination. The interferometry images are taken at the pupil plane and/or in the field plane to combine angular and spectroscopic scatterometry data that characterize and correct target topography and enhance the performance of metrology systems.
A system comprising:
A method comprising deriving at least one target characteristic from a plurality of interferometry images taken at a respective plurality of phase differences between target beams and reference beams yielding the interferometry images, wherein an illumination of the target and the reference has a coherence length of less than 30 microns and wherein the interferometry images are taken at at least one of a pupil and a field plane.
Dependencies are inferred from the claim text.