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US 2014/0111582 A1Published application
Liquid ejecting head, liquid ejecting apparatus and piezoelectric element
AssigneeSeiko Epson Corporation
InventorKoji Ohashi
Life of this patent
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Abstract
A liquid ejecting head includes a piezoelectric element, which is provided above a zirconium oxide layer having a piezoelectric layer and an electrode provided on the piezoelectric layer, in which the zirconium oxide layer is formed through a liquid-phase method and preferentially oriented with a (111) plane.
Claims8
A liquid ejecting head comprising:
- a piezoelectric element, which is provided above a zirconium oxide layer having a piezoelectric layer and an electrode provided on the piezoelectric layer,
- wherein the zirconium oxide layer is formed through a liquid-phase method and preferentially oriented with a (111) plane.
A piezoelectric element, which is provided above a zirconium oxide layer, comprising:
- a piezoelectric layer and an electrode provided on the piezoelectric layer,
- wherein the zirconium oxide layer is formed through a liquid-phase method and preferentially oriented with the (111) plane.
Dependencies are inferred from the claim text.