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US 2014/0111301 A1Published application
High-Resistance Thin-Film Resistor and Method of Forming the Resistor
AssigneeTexas Instruments Incorporated
InventorsByron Lovell Williams, John Britton Robbins
Life of this patent
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Abstract
The resistance of a thin-film resistor is substantially increased by forming the thin-film resistor to line one or more non-conductive trenches. By lining the one or more non-conductive trenches, the overall length of the resistor is increased while still consuming approximately the same surface area as a conventional resistor.
Claims20
A resistor comprising:
- a body having:
- a non-conductive top surface, and
- one or more trenches that each extends down from the non-conductive top surface into the body, each of the one or more trenches having a non-conductive inner surface;
- and
- a thin-film resistor structure that:
- touches a first portion of the non-conductive top surface and a first portion of the inner surface of each of the one or more trenches;
- and
- exposes a second portion of the non-conductive top surface.
5 more elements
A method of forming a resistor comprising:
- forming a body having:
- a non-conductive top surface, and
- one or more trenches that each extends down from the non-conductive top surface into the body, each of the one or more trenches having a non-conductive inner surface;
- depositing a metal layer that touches the non-conductive top surface and the inner surface of each of the one or more trenches, and forms one or more holes;
- and
- etching the metal layer to:
- form a thin-film resistor structure that touches a first portion of the non-conductive top surface and a first portion of the inner surface of each of the one or more trenches;
- and
- expose a second portion of the non-conductive top surface.
6 more elements
Dependencies are inferred from the claim text.