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US 2014/0111288 A1Published application
Acoustic resonator having guard ring
AssigneeAvago Technologies General IP (Singapore) Pte. Ltd.
InventorsPhil NIKKEL, Chris FENG, Dariusz BURAK, John CHOY
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Abstract
A bulk acoustic wave (BAW) resonator structure comprises a first electrode disposed over a substrate, a piezoelectric layer disposed over the first electrode, a second electrode disposed over the first piezoelectric layer, and a guard ring structure formed around a perimeter of an active region corresponding to an overlap of the first electrode, the first piezoelectric layer, and the second electrode.
Claims20
A bulk acoustic wave (BAW) resonator structure, comprising:
- a first electrode disposed over a substrate;
- a piezoelectric layer disposed over the first electrode;
- a second electrode disposed over the first piezoelectric layer;
- and
- a guard ring structure formed around a perimeter of an active region corresponding to an overlap of the first electrode, the first piezoelectric layer, and the second electrode.
2 more elements
The BAW resonator structure of claim it wherein the guard ring structure comprises:
- a first guard ring formed on a first side of the piezoelectric layer around a perimeter of the first electrode;
- and
- a second guard ring formed on a second side of the piezoelectric layer around a perimeter of the second electrode.
Dependencies are inferred from the claim text.