Spiral probe and method of manufacturing the spiral probe
AssigneeMeiko Electronics Co., Ltd.
InventorNoboru Shingai
Life of this patent
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Abstract
A spiral probe includes a tapered distal end portion (2) configured to be brought into direct contact with an inspection object, a hollow, nearly cylindrical distal body (3) extending in one direction from the base of the distal end portion (2), a hollow, nearly cylindrical flexible portion (4) integral with and continuously extending in the one direction from the distal body (3) and having a spiral outer peripheral surface, and a hollow, nearly cylindrical proximal end portion (5) integral with and continuously extending in the one direction from the flexible portion (4), wherein the distal body (3), the flexible portion (4) and the proximal end portion (5) have outer peripheral surfaces aligned with each other in the one direction.
Claims5
A spiral probe comprising:
- a tapered distal end portion configured to be brought into direct contact with an inspection object to be inspected;
- a hollow, nearly cylindrical distal body extending in one direction from a base of the distal end portion;
- a hollow, nearly cylindrical flexible portion integral with and continuously extending in the one direction from the distal body and having a spiral outer peripheral surface;
- and
- a hollow, nearly cylindrical proximal end portion integral with and continuously extending in the one direction from the flexible portion,
- wherein the distal body, the flexible portion and the proximal end portion have outer peripheral surfaces aligned with each other in the one direction.
Dependencies are inferred from the claim text.