Composite dilation mode resonators

A device comprising:

• an array of resonator structures, the array of resonator structures including a plurality of sets of one or more resonator structures, each resonator structure including:
• a first conductive layer including one or more first electrodes;
• a second conductive layer including one or more second electrodes;
• and
• a transduction layer arranged between the first conductive layer and the second conductive layer, the transduction layer having a thickness along a z axis, a width along an x axis, and a length along a y axis, the transduction layer including a plurality of constituent layers, the plurality of constituent layers each having substantially coplanar upper surfaces, the plurality of constituent layers including:
• a first set of one or more first piezoelectric layers each formed of a first piezoelectric material having a first set of piezoelectric coefficients and a first set of stiffness coefficients;
• and
• a second set of one or more second piezoelectric layers each formed of a second piezoelectric material having a second set of piezoelectric coefficients and a second set of stiffness coefficients;
• and
• wherein the transduction layer is configured to, responsive to one or more signals provided to each of one or more of the first electrodes and the second electrodes, provide at least a first mode of vibration of the transduction layer with a displacement component along the z axis and at least a second mode of vibration of the transduction layer with a displacement component along the plane of the x axis and they axis;
• wherein a thickness of the transduction layer of each resonator structure is substantially equal to the thicknesses of the transduction layers in all the other resonator structures in the array of resonator structures;
• wherein an effective combination of the first and second piezoelectric coefficients and the first and second stiffness coefficients in the transduction layer of each resonator structure in each set of resonator structures is substantially the same combination as in the other resonator structures of the set and different than the combinations in the other resonator structures of all the other sets in the array of resonator structures.

A device comprising:

• first conductive means including one or more first electrodes;
• second conductive means including one or more second electrodes;
• and
• transduction means arranged between the first conductive means and the second conductive means, the transduction means having a thickness along a z axis, a width along an x axis, and a length along a y axis, the transduction means including two or more constituent layers, the two or more constituent layers including:
• a first set of one or more first piezoelectric means each formed of a first piezoelectric material having a first set of piezoelectric coefficients and a first set of stiffness coefficients;
• and
• a second set of one or more second piezoelectric means each formed of a second piezoelectric material having a second set of piezoelectric coefficients and a second set of stiffness coefficients;
• and
• wherein the transduction means includes means for, responsive to one or more signals provided to each of one or more of the first electrodes and the second electrodes, provide at least a first mode of vibration of the transduction means with a displacement component along the z axis and at least a second mode of vibration of the transduction means with a displacement component along the plane of the x axis and they axis.