Micro-electro-mechanical generator and electrical device using the same

Abstract

Provided is a micro-electro-mechanical generator including: a first substrate configured to hold an electric charge on a surface of the substrate, and to have an electret film continuously provided on the surface; a second substrate having a collecting electrode provided on a surface facing the electret film; and a movable substrate having conductive property, disposed between the first and the second substrates, and supported movably along a predetermined direction with respect to the first and the second substrates. The movable substrate includes an opening penetrating through the movable substrate from a side of the first substrate to a side of the second substrate and allowing an electric field emitted from the electret film to pass through. The movement of the movable substrate causes or stops to cause the electric field to be emitted to the collecting electrode through the opening, and power is generated by the electric charge being excited in and discharged from the collecting electrode depending on whether or not the electric field is caused to be emitted.

Dependencies are inferred from the claim text.