Pipe joint
AssigneesFujikin Incorporated, Tokyo Electron Limited
InventorsTsuneyuki OKABE, Syuji MORIYA, Kenichi SATO, Tomohiro NAKATA, Tsutomu SHINOHARA, Michio YAMAJI
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AssigneesFujikin Incorporated, Tokyo Electron Limited
InventorsTsuneyuki OKABE, Syuji MORIYA, Kenichi SATO, Tomohiro NAKATA, Tsutomu SHINOHARA, Michio YAMAJI
Estimating the term…
A pipe joint which does not generate fine particles even though being repeatedly mounted and demounted is provided. A pipe joint includes first and second joint members having fluid channels communicating with each other, an annular gasket to be interposed between abutting end surfaces of the both joint members, and a nut configured to couple the joint members. The nut is provided with an inner surface treated layer. The inner surface treated layer includes a Co (cobalt)-P (phosphorous) alloy metal coating provided on an inner surface of the nut and a fluorine coating provided on the surface of the alloy metal coating.
A pipe joint comprising:
Dependencies are inferred from the claim text.