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US 2014/0110883 A1Published application
Imprint apparatus and imprint method
AssigneeFujitsu Limited
InventorsKatsuki SHIRAI, Chikara NISHIO
Life of this patent
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Abstract
An imprint apparatus includes: a mold that forms a pattern in a resin on a base plate; a press unit that presses the mold against the resin; a flow channel that is formed by a wall of the mold and a surface of the resin, air flowing along the wall and the surface; a supply unit that supplies air to the flow channel; wherein the supply unit supplies air with a first pressure to the flow channel when the mold makes contact with the resin.
Claims6
An imprint apparatus comprising:
- a mold that forms a pattern in a resin on a base plate;
- a press unit that presses the mold against the resin;
- a flow channel that is formed by a wall of the mold and a surface of the resin, air flowing along the wall and the surface;
- a supply unit that supplies air to the flow channel;
- wherein the supply unit supplies air with a first pressure to the flow channel when the mold makes contact with the resin.
2 more elements
An imprint method comprising:
- pressing a mold that forms a pattern in a resin on a base plate against the resin;
- and
- supplying air with a first pressure to a flow channel formed by a wall of the mold and a surface of the resin when the mold makes contact with the resin, air flowing along the wall and the surface.
Dependencies are inferred from the claim text.