Semiconductor Device
AssigneeSamsung Electronics Co., Ltd.
InventorsKeun-Nam KIM, Sun-Young PARK, Soo-Ho SHIN, Kye-Hee YEOM, Hyeon-Woo JANG, Jin-Won JEONG, Chang-Hyun CHO, Hyeong-sun HONG
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Abstract
A semiconductor device includes a plurality of bit lines that intersect an active region on a substrate and extend in a first direction, a contact pad formed on the active region between adjacent bit lines, and a plurality of spacers disposed on sidewalls of the plurality of bit lines. An upper portion of the contact pad is interposed between adjacent spacers, and a lower portion of the contact pad has a width greater than a distance between adjacent spacers.
Claims15
A semiconductor device comprising:
- a plurality of bit lines that intersect an active region on a substrate and extend in a first direction;
- a contact pad disposed on the active region between adjacent bit lines;
- and
- a plurality of spacers disposed on sidewalls of the plurality of bit lines,
- wherein an upper portion of the contact pad is interposed between adjacent spacers, and a lower portion of the contact pad has a width greater than a distance between adjacent spacers.
A semiconductor device comprising:
- a buried insulating layer disposed on a substrate;
- a plurality of bit lines disposed on the buried insulating layer that extend in a first direction, the plurality of bit lines having sidewalls upon which first spacers are disposed;
- a plurality of contact pads interposed in the buried insulating layer between adjacent bit lines, each of the plurality of contact pads having a width greater than a distance between adjacent first spacers;
- and
- a plurality of contact plugs respectively disposed on the plurality of contact pads between adjacent bit lines.
Dependencies are inferred from the claim text.