Semiconductor devices having hybrid capacitors and methods for fabricating the same

A semiconductor device comprising:

• a plurality of capacitors on a substrate, each of the capacitors including a lower electrode, an upper electrode, and a dielectric layer between the lower and upper electrodes wherein each of the lower electrodes comprises:
• a first electrode portion electrically connected to the substrate and having a solid shape;
• and
• a second electrode portion stacked on the first electrode portion and having a shape comprising an opening therein;
• a lower support pattern contacting sidewalls of the first electrode portion at a first position between a bottom surface of the second electrode portion and half of a height of the lower electrode from a bottom surface of the lower electrode;
• and
• an upper support pattern spaced apart from the lower support pattern and contacting sidewalls of the first electrode portion at a second position between a top surface of the second electrode portion.and half of a height of the second electrode portion from the bottom surface of the second electrode portion.