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US 2014/0110781 A1Published application
Semiconductor device with buried bit line and method for fabricating the same
AssigneeSK hynix Inc.
InventorEui-Seong HWANG
Life of this patent
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Abstract
A semiconductor device includes trenches defined in a substrate, buried bit lines partially filling the trenches, a first source/drain layer filling remaining portions of the trenches on the buried bit lines, stack patterns having a channel layer and a second source/drain layer stacked therein and bonded to the first source/drain layer, wherein the channel layer contacts with the first source/drain layer, and word lines crossing with the buried bit lines and disposed adjacent to sidewalls of the channel layer.
Claims12
A semiconductor device comprising:
- trenches defined in a substrate;
- buried bit lines partially filling the trenches;
- a first source/drain layer filling remaining portions of the trenches on the buried bit lines;
- stack patterns having a channel layer and a second source/drain layer stacked therein and bonded to the first source/drain layer, wherein the channel layer contacts with the first source/drain layer;
- and
- word lines crossing with the buried bit lines and disposed adjacent to sidewalls of the channel layer.
3 more elements
12-29. (canceled)
Dependencies are inferred from the claim text.