Multinozzle Emitter Arrays for Ultrahigh-Throughput Nanoelectrospray Mass Spectrometry

A method for making a multinozzle emitter array comprising:

• (a) providing a first silicon substrate having a first surface,
• (b) etching a first trench into the first surface of the first substrate,
• (c) fusing a second silicon substrate onto the first surface of the first silicon substrate to form one or more channels,
• (d) oxidizing the exposed surfaces of the first and second silicon substrates to form a thermal oxidation layer over the exposed surfaces of the first and second silicon substrates,
• (e) cutting one or more ends of the first and second silicon substrates to form one or more nozzles from the one or more channels,
• (f) optionally sharpening the end of one or more nozzles, and
• (g) optionally etching the end of one or more sharpened nozzles to form an emitter nozzle that protrudes from the first and second silicon substrates.