Movement-free bending method for one-dimensional or two-dimensional nanostructure using ion beam
AssigneeKorea Research Institute of Standards and Science
InventorsDal Hyoun Kim, Hwack Joo Lee, Sang Jung Ahn
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Abstract
The movement-free bending method means the one of deformation methods for a one- or two-dimensional nanostructures using an ion beam capable of bending and deforming them and furthermore, changing a bending direction without requiring a motion such as a rotation of the nanostructures. The present invention affords a movement-free bending method for deforming the nanostructure 20 having the one-dimensional or two-dimensional shape by irradiating the ion beam 10, wherein a bending direction of the nanostructure 20 is controlled depending on energy of the ion beam 10 or a thickness of the nanostructure 20.
Claims17
A movement-free bending method for a one-dimensional or two-dimensional nanostructure 20 using an ion beam 10, wherein
- a bending direction of the nanostructure 20 is controlled depending on energy of the ion beam 10.
A movement-free bending method for a one-dimensional or two-dimensional nanostructure 20 using an ion beam 10, wherein
- a bending direction of the nanostructure 20 is controlled depending on a thickness of the nanostructure 20.
Dependencies are inferred from the claim text.