Near-field optical defect inspection apparatus

Abstract

A near-field optical defect inspection apparatus according to an aspect of this invention includes a motor, a slider, a slider-moving mechanism, a light source, and a light-collecting probe. The motor rotates an object to be inspected. The slider slides above the rotating object. The slider-moving mechanism supports the slider and moves it above the object rotated by the motor. The light source emits inspection light that irradiates the object rotated by the motor, the inspection light propagating through an internal region of the object to be inspected. The light-collecting probe has an opening, from which the probe collects near-field light due to a defect in the object irradiated with the inspection light. The opening, formed on a surface of the slider that is opposed to the object to be inspected, has a maximal diameter smaller than a wavelength of visible light.

Dependencies are inferred from the claim text.