Back to results
US 2014/0110398 A1Published application
Heater apparatus
AssigneeTokyo Electron Limited
InventorMakoto Kobayashi
Life of this patent
Estimating the term…
Abstract
Provided is a heater apparatus capable of preventing the movement of a heater element. The heater apparatus includes a heat insulating material, a cylindrical support disposed in the vicinity of the heat insulating material, a heater element formed by being spirally wound around the outer circumference of the support a plurality of times, and a movement preventing member configured to prevent the movement of the heater element in the axial direction of the support.
Claims10
A heater apparatus comprising:
- a heat insulating material;
- a cylindrical support disposed in the vicinity of the heat insulating material;
- a heater element formed by being spirally wound around an outer circumference of the support a plurality of times;
- and
- a movement preventing member configured to prevent the movement of the heater element in an axial direction of the support.
2 more elements
Dependencies are inferred from the claim text.