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US 2014/0110254 A1Published application
Backing Plate for a Sputter Target, Sputter Target, and Sputter Device
AssigneeInfineon Technologies AG
InventorsMarkus Fischer, Wolfram Karcher, Barbara Jeansannetas
Life of this patent
Estimating the term…
Abstract
A backing plate for a sputter target includes a target receiving part for receiving a target to be sputtered, and a structure for exposing the target receiving part through the backing plate.
Claims22
A backing plate for a sputter target, comprising:
- a target receiving part for receiving a target to be sputtered;
- and
- a structure for exposing the target receiving part through the backing plate.
A backing plate for a sputter target, the backing plate comprising:
- two opposing main surfaces connected by a side surface;
- a target receiving portion at one of the two main surfaces for receiving a target to be sputtered;
- and
- a plurality of holes extending from the target receiving portion at the one of the two main surfaces to the other one of the two main surfaces, the plurality of holes being arranged in a plurality of concentrically arranged annular patterns.
1 more element
A backing plate for a sputter target, the backing plate comprising:
- a target receiving part for receiving a target to be sputtered;
- and
- means for exposing the target receiving part through the backing plate.
A sputter target, comprising:
- a backing plate including a target receiving part for receiving a target to be sputtered, and a structure for exposing the target receiving part through the backing plate;
- and
- a target bonded to the target receiving part of the backing plate.
A sputter device, comprising:
- a vacuum process chamber;
- a sputter target receptacle for mounting a sputter target at least with its target in the process chamber, the sputter target receptacle including a first port for connecting to a sputter port of a sputter target mounted thereto, and a second port connected to the first port and to the exterior of the vacuum process chamber;
- and
- a holder for receiving an element to be processed.
1 more element
Dependencies are inferred from the claim text.