Conveyor assembly with geared, removable rollers for a vapor deposition system

A vapor deposition module for use in conveying a substrate through a vapor deposition system wherein a source material is converted to a vapor and deposited onto a surface of the substrate, the vapor deposition module comprising:

• a housing;
• a conveyor assembly operably configured within the housing to convey a substrate through the housing, the conveyor assembly comprising:
• a first carriage rail disposed on a drive side of the conveyor assembly and a second carriage rail disposed on an opposite side of the conveyor assembly, the first and second carriage rails defining a plurality of roller positions spaced apart longitudinally therealong, a plurality of the roller positions on the first carriage rail being configured as drive positions,
• a drive pulley disposed at each drive position, each drive pulley configured to rotationally drive a drive device;
• and
• a plurality of rollers extending between the first and second carriage rails at the roller positions, the rollers disposed at the drive positions configured to engage the drive devices.

A vapor deposition system configured for converting to vapor and depositing a source material onto a surface of a substrate conveyed through the system, the vapor deposition system comprising:

• a plurality of individual, longitudinally aligned modules, the modules defining a conveyance path for substrates conveyed through the system, each of the modules comprising:
• a housing;
• a conveyor assembly operably configured within the housing to convey the substrate through the housing, said conveyor assembly comprising:
• a first carriage rail disposed on a drive side of the conveyor assembly and a second carriage rail disposed on an opposite side of the conveyor assembly, the first and second carriage rails defining a plurality of roller positions, a plurality of the roller positions on the first carriage rail being configured as drive positions,
• a drive pulley disposed at each drive position, each drive pulley configured to rotatably drive a driven device;
• and
• a plurality of rollers extending between the first and second carriage rails at the roller positions, the rollers disposed at the drive positions configured to engage the drive devices.