Electric actuator
AssigneeTokyo Electron Limited
InventorShinji Wakabayashi
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Abstract
Provided is an electric actuator capable of preventing the release of particles from the body thereof. The electric actuator includes a body made of an elongated enclosure; a slider configured to move in a reciprocating manner along a lengthwise direction of the body; an opening formed in a side surface of the body to correspond to a moving path of the slider; a dust seal band provided to cover the opening; and a pair of electrodes protruding from the body at opposite sides of the opening toward the outside of the body and extending in the lengthwise direction of the body with the opening being interposed between the pair of electrodes. Positive potential is generated in the upper electrode of the pair of electrodes and negative potential is generated in the lower electrode of the pair of electrodes.
Claims7
An electric actuator comprising:
- a body made of an elongated enclosure;
- a base portion configured to move in a reciprocating manner along a lengthwise direction of the body;
- an opening formed in a side surface of the body to correspond to a moving path of the base portion;
- a seal member provided to cover the opening;
- and
- a pair of electrodes protruding from the body toward the outside of the body at opposite sides of the opening and extending in the lengthwise direction of the body with the opening being interposed between the pair of electrodes,
- wherein positive potential is generated in one of the pair of electrodes and negative potential is generated in the other of the pair of electrodes.
Dependencies are inferred from the claim text.