Substrate processing apparatus

A substrate processing apparatus, comprising:

• a process module including a processing container, a rotary table installed within the processing container and configured to rotate about a vertical axis, the rotary table having a plurality of placing regions formed along a circumferential direction thereof so as to receive substrates, and a process gas supply unit configured to supply a process gas to the placing regions so as to process the substrates;
• a load port in which a transfer container containing product substrates is placed;
• a dummy substrate receiving unit in which dummy substrates are received;
• a transfer chamber including a transfer mechanism configured to deliver the product substrates or the dummy substrates between the transfer container on the load port or the dummy substrate receiving unit and the rotary table;
• a setting unit configured to set a placing region to which at least one of the product substrates contained in the transfer container is to be transferred;
• and
• a control unit configured to output a control signal such that the dummy substrates are carried into the remaining placing regions other than the placing region which is set by the setting unit and into which said at least one of the product substrates is to be carried.