Flow Sensor and Manufacturing Method of the Same and Flow Sensor Module and Manufacturing Method of the Same

A flow sensor comprising:

• (a) a first chip mounting unit mounting a first semiconductor chip formed with a plurality of first pads;
• (b) a second chip mounting unit mounting a second semiconductor chip formed with a plurality of second pads;
• (c) a plurality of first leads disposed on an outside of the first chip mounting unit;
• (d) a plurality of second leads disposed on an outside of the second chip mounting unit;
• (e) the first semiconductor chip disposed on the first chip mounting unit;
• (f) the second semiconductor chip disposed on the second chip mounting unit;
• (g) a plurality of first wires connecting the plurality of first leads and the plurality of first pads formed on the first semiconductor chip, respectively;
• (h) a plurality of second wires connecting the plurality of second leads and the plurality of second pads formed on the second semiconductor chip, respectively,
• wherein the first semiconductor chip includes:
• (e1) a flow sensing unit formed on a main surface of a first semiconductor substrate;
• and
• (e2) a diaphragm formed in a region facing the flow sensing unit of the rear surface opposite to the main surface of the first semiconductor substrate,
• wherein the second semiconductor chip includes
• (f1) a control circuit unit formed on a main surface of a second semiconductor substrate and controlling the flow sensing unit,
• wherein a part of the first chip mounting unit, the second chip mounting unit, a part of each of the plurality of first leads, a part of each of the plurality of second leads, a part of the first semiconductor chip, the second semiconductor chip, the plurality of first wires, and the plurality of second wires are sealed with a sealing body formed of resin in a state in which the flow sensing unit formed on the first semiconductor chip is exposed, and
• wherein an upper part of the first semiconductor chip is partially covered with the resin in an optional section being parallel to a traveling direction of a gas that flows above the exposed flow sensing unit.