Micro-electro-mechanical device and method for making the same
AssigneePixart Imaging Incorporation
InventorMing-Han Tsai
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Abstract
The invention provides a micro-electro-mechanical device which includes a substrate, an electrode, and a diaphragm. The electrode includes plural vent holes. The diaphragm is disposed above and in parallel to the electrode, to form a capacitive sensor with the electrode. The diaphragm includes plural ribs protruding upward and/or downward from the diaphragm; the ribs are respectively disposed in correspondence to the plural vent holes and do not overlap nor contact the electrode. A method for making the micro-electro-mechanical device is also provided according to the present invention.
Claims18
A micro-electro-mechanical device, comprising:
- an electrode including a plurality of vent holes;
- and
- a diaphragm, disposed above and in parallel to the electrode to form a capacitive sensor with the electrode, and including a plurality of ribs protruding upward and/or downward from the diaphragm which are respectively disposed in correspondence to the vent holes, wherein the ribs do not contact the electrode and do not overlap the electrode from top view.
A method of making micro-electro-mechanical device, comprising:
- providing a substrate;
- forming an electrode having a plurality of vent holes;
- forming a spacer on the substrate;
- and
- forming a diaphragm connected to the spacer so that the diaphragm form a capacitor sensor with the electrode, and forming a plurality of ribs protruding upward and/or downward from the diaphragm which are respectively disposed in correspondence to the vent holes, wherein the ribs do not contact the electrode and do not overlap the electrode from top view.
Dependencies are inferred from the claim text.